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Atomic layer deposition: A versatile technology for MEMS and NEMS
Sarro, L.
(Invited speaker)
Electronic Components, Technology and Materials
Activity
:
Talk or presentation
›
Talk or presentation at a conference
Description
Plenary talk
Period
2 Sep 2013
Event title
MME 2013: 24th Micromechanics and Microsystems Europe Conference
Event type
Conference
Location
Espoo, Finland