Modeling the precursor utilization in atomic layer deposition on nanoparticles in fluidized bed reactors

Kreutzer, M. T. (Speaker), Grillo, F. (Speaker), van Ommen, R. (Speaker)

Activity: Talk or presentationTalk or presentation at a conference

Period2014
Event title2nd Int. Conference on ALD Applications & 3rd China ALD Conference
Event typeConference