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Multi-beam coherent Fourier scatterometry data
S. Soman
(Creator)
S.F. Pereira
(Creator)
ImPhys/Pereira group
Dataset
Overview
Date made available
12 Jan 2026
Publisher
TU Delft - 4TU.ResearchData
DOI
10.4121/ed5e86dc-0854-4ea2-a5ad-6511ab3a72e0
Cite this
DataSetCite
Soman, S. (Creator), Pereira, S. F. (Creator) (
12 Jan 2026
). Multi-beam coherent Fourier scatterometry data. TU Delft - 4TU.ResearchData.
10.4121/ed5e86dc-0854-4ea2-a5ad-6511ab3a72e0