Equipments Details
Description
EKL is one of the biggest cleanrooms in The Netherlands with over 600 m2 of cleanroom class 100 (ISO 5) and 400 m2 of cleanroom class 10'000 (ISO 7). It is located in Building 36, EWI Faculty, and allows full fabrication and characterisation of any active or passive nanostructure starting from a silicon wafer. The laboratory offers sub-micrometer resolution lithography, thin film deposition and etching, bulk and surface micromachining, packaging, and assembly of the final device. Moreover, polymer based, biocompatible and biodegradable devices can be fully fabricated and synthesized in EKL.