Research Output

2020

Fabrication of Al-based superconducting high-aspect ratio TSVs for quantum 3D integration

Alfaro Barrantes, J., Mastrangeli, M., Thoen, D., Bueno Lopez, J., Baselmans, J. & Sarro, L., 1 Jan 2020, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Vol. 2020-January. p. 932-935 4 p. 9056165

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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1 Downloads (Pure)
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2 Downloads (Pure)
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15 Downloads (Pure)

Superconducting High-Aspect Ratio Through-Silicon Vias with DC-Sputtered Al for Quantum 3D integration

Alfaro Barrantes, J., Mastrangeli, M., Thoen, D., Visser, S., Bueno Lopez, J., Baselmans, J. & Sarro, L., Jul 2020, In : IEEE Electron Device Letters. 41, 7, p. 1114-1117 4 p.

Research output: Contribution to journalArticleScientificpeer-review

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1 Citation (Scopus)
44 Downloads (Pure)
2019
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105 Downloads (Pure)
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1 Downloads (Pure)

Calibrated quantum thermometry in cavity optomechanics

Chowdhury, A., Vezio, P., Bonaldi, M., Borrielli, A., Marino, F., Morana, B., Pandraud, G., Sarro, P. M., Serra, E. & More Authors, 2019, In : Quantum Science and Technology. 4, 2, p. 1-9 9 p., 024007.

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Enzyme-Catalyzed Synthesis of Esters in Water

Mestrom, L., Claessen, J. G. R. & Hanefeld, U., 2019, In : ChemCatChem. 11, 7, p. 2004-2010

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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12 Citations (Scopus)
106 Downloads (Pure)

First Near-Ultraviolet- and Blue-Enhanced Backside-Illuminated Single-Photon Avalanche Diode Based on Standard SOI CMOS Technology

Lee, M. J., Sun, P., Pandraud, G., Bruschini, C. & Charbon, E., 2019, In : IEEE Journal of Selected Topics in Quantum Electronics. 25, 5, p. 1-6 6 p., 8721460.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Open Access
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4 Citations (Scopus)
32 Downloads (Pure)

MEMS Enabled Fast Time-Resolved X-Ray Diffraction Characterization Platform for Copper Nanoparticle Sintering in Heterogeneous Integration Applications

Zhang, B., Wei, J., Bottger, A. J., van Zeijl, H. W., Sarro, P. M. & Zhang, G., 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings. Danvers: IEEE, p. 1772-1775 4 p. 8808192

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Metal and Polymeric Strain Gauges for Si-based, Monolithically Fabricated Organs-on-Chips

Quiros Solano, W. F., Gaio, N., Silvestri, C., Pandraud, G., Dekker, R. & Sarro, P. M., 2019, In : Micromachines. 10, 8, p. 1-15 15 p., 536.

Research output: Contribution to journalArticleScientificpeer-review

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2 Citations (Scopus)
53 Downloads (Pure)

Timewalk correction for the Timepix3 chip obtained with real particle data

Tsigaridas, S., Beuzekom, M. V., Graaf, H. V. D., Hartjes, F., Heijhoff, K., Hessey, N. P., de Jong, P. J. & Prodanovic, V., 2019, In : Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 930, p. 185-190

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Ultra-thin mems fabricated tynodes for electron multiplication

Prodanovic, V., 2019, 130 p.

Research output: ThesisDissertation (TU Delft)

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5 Downloads (Pure)

Vertical SiC taper with a small angle fabricated by slope transfer method

Xin, Y., Pandraud, G. & French, P. J., 2019, In : Electronics Letters. 55, 11, p. 661-663 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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1 Citation (Scopus)
55 Downloads (Pure)
2018

A highly miniturized single-chip MOEMS scanner for all-in-one imaging solution

Jovic, A., Uto, T., Hei, K., Sancho, J., Sanchez, N., Zinoviev, K., Rubio, J. L., Margallo, E., Pandraud, G. & Sarro, P. M., 2018, 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Piscataway, NJ: IEEE, Vol. 2018-January. p. 25-28 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner

Jovic, A., Pandraud, G., Sanchez Losilla, N., Sancho, J., Zinoviev, K., Rubio, J. L., Margallo Balbas, E. & Sarro, L., 2018, In : Journal of Microelectromechanical Systems. 27, 2, p. 259-268 10 p.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Designing a 100 [aF/nm] capacitive transducer

Middelburg, L. M., Mansouri, B. E., Poelma, R. H., Van Zeijl, H. W., Wei, J., Zhang, G. Q. & Van Driel, W. D., 2018, 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018. Piscataway, NJ: IEEE, p. 1-3 3 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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24 Downloads (Pure)

Effect of thermal annealing and chemical treatments on secondary electron emission properties of atomic layer deposited MgO

Prodanović, V., Chan, H. W., Mane, A. U., Elam, J. W., Minjauw, M. M., Detavernier, C., van der Graaf, H. & Sarro, P. M., 2018, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 6, p. 1-9 9 p., 06A102.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Effects of Conformal Nanoscale Coatings on Thermal Performance of Vertically Aligned Carbon Nanotubes

Silvestri, C., Riccio, M., Poelma, R. H., Jovic, A., Morana, B., Vollebregt, S., Irace, A., Zhang, G. Q. & Sarro, P. M., 2018, In : Small. 14, 20, p. 1-10 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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8 Citations (Scopus)
25 Downloads (Pure)

Leaky Lens Antenna as Optically Pumped Pulsed THz Emitter

Garufo, A., Sberna, P., Carluccio, G., Bueno, J., Freeman, J. R., Llombart, N., Linfield, E. H., Davies, A. G. & Neto, A., 2018, 43rd International Conference on Infrared Millimeter and Terahertz Waves, IRMMW-THz 2018. Tani, M. & Idehara, T. (eds.). Los Alamitos, CA: IEEE, Vol. 2018-September. p. 1-1 1 p. 8509897

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing

Iannacci, J., Serra, E., Sordo, G., Bonaldi, M., Borrielli, A., Schmid, U., Schneider, M., Pandraud, G., Sarro, P. M. & More Authors, 2018, In : Microsystem Technologies. 24, 12, p. 5027-5036 10 p.

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Non-linear bulk micromachined accelerometer for high sensitivity applications

Middelburg, L. M., Mansouri, B. E., Poelma, R., Zhang, G. Q., van Zeijl, H. & Wei, J., 2018, 2018 IEEE SENSORS Proceedings. Roy, A. & Gianchandani, Y. (eds.). Piscataway, NJ: IEEE, Vol. 2018-October. p. 1-4 4 p. 8589630

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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50 Downloads (Pure)

Normal-Mode Splitting in a Weakly Coupled Optomechanical System

Rossi, M., Kralj, N., Zippilli, S., Natali, R., Borrielli, A., Pandraud, G., Serra, E., Di Giuseppe, G. & Vitali, D., 2018, In : Physical Review Letters. 120, 7, p. 1-5 5 p., 073601.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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22 Citations (Scopus)
61 Downloads (Pure)

Quantum nondemolition measurement of optical field fluctuations by optomechanical interaction

Pontin, A., Bonaldi, M., Borrielli, A., Marconi, L., Marino, F., Pandraud, G., Prodi, G. A., Sarro, P. M., Serra, E. & Marin, F., 2018, In : Physical Review A. 97, 3, 033833.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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6 Citations (Scopus)
50 Downloads (Pure)

Wafer-Scale Integration for Semi-Flexible Neural Implant Miniaturization

Kluba, M., Morana, B., Savov, A., van Zeijl, H., Pandraud, G. & Dekker, R., 2018, In : Proceedings. 2, 13, 5 p., 941.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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3 Downloads (Pure)
2017

Design and fabrication of two types of tapered waveguides for evanescent sensing

Xin, Y., Zhang, Y., Pandraud, G. & French, P., 2017, Smart Systems Integration 2017: International Conference and Exhibition on Integration Issues of Miniaturized Systems. Otto, T. (ed.). Mesago Messe Frankfurt GmbH, p. 282-288 7 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Enhancement of three-mode optomechanical interaction by feedback-controlled light

Kralj, N., Rossi, M., Zippilli, S., Natali, R., Borrielli, A., Pandraud, G., Serra, E., Di Giuseppe, G. & Vitali, D., 2017, In : Quantum Science and Technology. 2, 3, p. 1-12 12 p., 034014.

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Enhancing Sideband Cooling by Feedback-Controlled Light

Rossi, M., Kralj, N., Zippilli, S., Natali, R., Borrielli, A., Pandraud, G., Serra, E., Di Giuseppe, G. & Vitali, D., 2017, In : Physical Review Letters. 119, 12, 123603.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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27 Citations (Scopus)
20 Downloads (Pure)

Integrated SiGe Detectors for Si Photonic Sensor Platforms

Pandraud, G., Milosavljevic, S., Sammak, A., Cherchi, M., Jovic, A. & Sarro, P., 2017, Proceedings of Eurosensors 2017. p. 1-5 5 p. 559. (Proceedings; vol. 1, no. 4).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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31 Downloads (Pure)

Method of forming silicon on a substrate

van der Zwan, M., Ishihara, R. & Trifunovic, M., 2017, IPC No. C30B; H01L, Patent No. US 9.595.437, Priority date 26 Apr 2013

Research output: Patent

Monolithic 3D Wafer Level Integration: Applied for Smart LED Wafer Level Packaging

Kolahdouz Esfahani, Z., 2017, 193 p.

Research output: ThesisDissertation (TU Delft)

Open Access
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197 Downloads (Pure)

Polycrystalline Silicon TFTs on a Paper Substrate Using Solution-Processed Silicon

Trifunovic, M., Sberna, P. M., Shimoda, T. & Ishihara, R., 2017, 2016 IEEE International Electron Devices Meeting, IEDM 2016. Fay, P. (ed.). Piscataway, NJ, USA: IEEE, p. 1-4 7838527

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Polymeric strain gauges as pressure sensors for microfabricated organ-on-chips

Quiros-Solano, W. F., Gaio, N., Silvestri, C., Pandraud, G. & Sarro, P. M., 2017, Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators, and Microsystems. Fang, W., Hung, C. P. & Shoji, S. (eds.). Piscataway, NJ: IEEE, p. 1296-1299 4 p. 7994293

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Poly-Si(O)x passivating contacts for high-efficiency c-Si IBC solar cells

Yang, G., Zhang, Y., Procel, P., Weeber, A., Isabella, O. & Zeman, M., 2017, In : Energy Procedia. 124, p. 392-399 8 p.

Research output: Contribution to journalConference articleScientificpeer-review

Open Access
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9 Citations (Scopus)
21 Downloads (Pure)

Quantum nondemolition measurement of light intensity fluctuations in an optomechanical experiment

Pontin, A., Bonaldi, M., Borrielli, A., Marconi, L., Marino, F., Pandraud, G., Prodi, G. A., Sarro, P. M., Serra, E. & Marin, F., 2017. 1 p.

Research output: Contribution to conferenceAbstractScientific

Open Access
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9 Downloads (Pure)
11 Citations (Scopus)

Solution-based polycrystalline silicon transistors produced on a paper substrate

Trifunovic, M., Shimoda, T., Ishihara, R. & Sberna, P., 2017, In : npj Flexible Electronics. 1, 12, 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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18 Downloads (Pure)

Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

Xin, Y., Pandraud, G., van Langen-Suurling, A. & French, P., 2017, Proceedings of IEEE Sensors Conference 2017. Piscataway, NJ: IEEE, p. 1-3 3 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Thin-Film layers with interfaces that reduce RF losses on High-Resistivity silicon substrates

Evseev, S. B., Milosavljević, S. & Nanver, L. K., 2017, Proceedings - 2017 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, BCTM 2017. Piscataway, NJ: IEEE, Vol. 2017-October. p. 21-24 4 p. 8112903

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Two novel MEMS actuator systems for self-aligned integrated 3D optical coherent tomography scanners

Jovic, A., Pandraud, G., Sanchez, N., Sancho, J., Zinoviev, K., Rubio, J. L., Margallo, E. & Sarro, P. M., 23 Feb 2017, MEMS 2017: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems. Piscataway, NJ: IEEE, p. 797-800 4 p. 7863528

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
2016

3D interconnect technology based on low temperature copper nanoparticle sintering

Zhang, B., Carisey, Y., Damian, A., Poelma, R., Zhang, G. Q. & van Zeijl, H., 2016, Proceedings of the 17th International Conference on Electronic Packaging Technology (ICEPT). Bi, K., Liu, S. & Zhou, S. (eds.). IEEE, p. 1163-1167

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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3 Citations (Scopus)
52 Downloads (Pure)

A mixing surface acoustic wave device for liquid sensing applications: Design, simulation, and analysis

Bui, T., Morana, B., Scholtes, T., Chu Duc, T. & Sarro, P. M., 2016, In : Journal of Applied Physics. 120, 7, p. 1-10 10 p., 074504.

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)

A novel mixing surface acoustic wave device for liquid sensing applications

Bui, T. H., Morana, B., Scholtes, T., Chu Duc, T. & Sarro, L., 2016, 2016 IEEE 29th International Conference Micro Electro Mechanical Systems (MEMS). Piscataway, NJ: IEEE, p. 745-748 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors

Vollebregt, S., Alfano, B., Ricciardella, F., Giesbers, A. J. M., Grachova, Y., van Zeijl, H., Polichetti, T. & Sarro, L., Jan 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, NJ: IEEE, p. 17-20 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

8 Citations (Scopus)

Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators

Thomas, S., Jovic, A., Morana, B., Buja, F., Gkouzou, A., Pandraud, G. & Sarro, P. M., 2016, In : Procedia Engineering. 168, p. 1144-1147 4 p.

Research output: Contribution to journalConference articleScientificpeer-review

Open Access
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1 Citation (Scopus)
16 Downloads (Pure)

Control of recoil losses in nanomechanical SiN membrane resonators

Borrielli, A., Marconi, L., Marin, F., Marino, F., Morana, B., Pandraud, G., Pontin, A., Prodi, G. A., Sarro, P. M., Serra, E. & Bonaldi, M., 2016, In : Physical Review X. 94, 12, p. 121403-1/121403-5 5 p., 121403.

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Design, Fabrication, Testing and Modeling of a Vaporizing Liquid Micro-Propulsion System

van Wees, T., Hanselaar, C., Jansen, E., Cervone, A., Zandbergen, B. & van Zeijl, H., 2016, Space propulsion 2016. 12 p. SPC2016_3124914

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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1006 Downloads (Pure)

Dynamical Two-Mode Squeezing of Thermal Fluctuations in a Cavity Optomechanical System

Pontin, A., Bonaldi, M., Borrielli, A., Marconi, L., Marino, F., Pandraud, G., Prodi, G. A., Sarro, P. M., Serra, E. & Marin, F., 2016, In : Physical Review Letters. 116, 10, p. 1-6 6 p., 103601.

Research output: Contribution to journalArticleScientificpeer-review

31 Citations (Scopus)

Effect of the interruption of the Propagation Path on the Response of Surface Acoustic Wave Transducers

Bui, T., Tran, A., Morana, B., Wei, J., Chu Duc, T. & Sarro, P. M., 2016, 2016 IEEE Sensors Proceedings. Fontana, E. & Ruiz-Zamarreno, C. (eds.). Piscataway, NJ: IEEE, p. 1-3 3 p. 7808654

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review