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Electrical Engineering, Mathematics and Computer Science
Delft University of Technology
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https://www.tudelft.nl/ewi
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Researchers
(1489)
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(13)
Research output
(31354)
Datasets
(147)
Prizes
(109)
Activities
(1407)
Press/Media
(102)
Research output
Research output per year
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2007
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2015
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1
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Artefact
Research output per year
Research output per year
1 results
Publication Year, Title
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Publication Year, Title
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Type
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2011
Method of monolithically integrating MEMS/NEMS sensors/actuators with MEMS/NEMS sensors/actuators and example semiconductor process for making the same
Rajaraman, V.
,
2011
Research output
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Non-textual form
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