Research output per year
Research output per year
Search results
-
2023
Comparison of Different Optimization Techniques in Electron Lens Design
Hesam Mahmoudi Nezhad, N., Ghaffarian Niasar, M., Hagen, C. W. & Kruit, P., 2023, 2023 9th International Conference on Optimization and Applications, ICOA 2023 - Proceedings. Hachimi, H., Abdo, A. A. & Benmamoun, Z. (eds.). IEEE, 5 p. (2023 9th International Conference on Optimization and Applications, ICOA 2023 - Proceedings).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open AccessFile45 Downloads (Pure) -
Tuning Parameters in the Genetic Algorithm Optimization of Electrostatic Electron Lenses
Hesam Mahmoudi Nezhad, N., Ghaffarian Niasar, M., Hagen, C. W. & Kruit, P., 2023, Proceedings of the 2023 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO). IEEE, p. 170-173 4 p. (2023 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization, NEMO 2023).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open AccessFile102 Downloads (Pure) -
2013
Increased particle inspection sensitivity by reduction of background scatter variance
Van Der Walle, P., Kumar, P., Ityaksov, D., Versluis, R., Maas, D. J., Kievit, O., Janssen, O. & Van Der Donck, J. C. J., 2013, Metrology, Inspection, and Process Control for Microlithography XXVII. 868116. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8681).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
-
2012
Nanoparticle detection limits of TNO's Rapid Nano: Modeling and experimental results
Van Der Walle, P., Kumar, P., Ityaksov, D., Versluis, R., Maas, D. J., Kievit, O., Janssen, J. & Van Der Donck, J. C. J., 2012, Photomask Technology 2012. Abboud, F. E. & Faure, T. B. (eds.). SPIE, 2006408. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8522).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review