QN/Kavli Nanolab Delft

Research output

Research output per year 1996 1999 2000 2001 2002 2006 2007 2008 2009 2010 2024

• 161 Article
• 83 Conference contribution
• 19 Report
• 7 Chapter
• 18 More
  • 5 Conference article
  • 5 Dissertation (TU Delft)
  • 3 Poster
  • 2 Patent
  • 1 Abstract
  • 1 Comment/Letter to the editor
  • 1 Editorial

Research output per year

Research output per year

Search results

• 2009

  Method for improvement of aspect ratio, uniformity and pattern transfer capabilities for ultra high resolution

  Sidorkin, VA. & van der Drift, EWJM., 2009, IPC No. Aanvrager: TU Delft (OCT-08-070), Patent No. 2002904, Priority date 19 May 2009

  Research output: Patent
• 2003

  Procédé et dispositif de gravure anisotrope du silicum à haut facteur d'aspect

  Puech, M. & van der Drift, EWJM., 2003, Patent No. PCT/FR02/04588, Priority date 30 Jan 2003

  Research output: Patent