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Advancing Optical Metrology with Coherent Fourier Scatterometry
Paul, A., 2026, 143 p.Research output: Thesis › Dissertation (TU Delft)
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Characterization of the 3D-Optical Properties of van der Waals Materials with Deep Learning-Based Coherent Fourier Scatterometry
Paul, A., Rishav, K., Klootwijk, G., Sarkar, M., Bisht, O., Li, Z., Conesa-Boj, S., Papadakis, G. T. & Pereira, S. F., 2026, In: ACS Photonics. 13, 1, p. 224-235 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
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Implementation of quad detection scheme in coherent Fourier scatterometry for inspection of patterned structures
Paul, A. & Pereira, S. F., 2025, Optical Measurement Systems for Industrial Inspection XIV. Lehmann, P., Osten, W. & Goncalves, A. A. (eds.). SPIE, 9 p. 135671I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13567).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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Limits of detection of defects near edges of nanostructures for coherent Fourier scatterometry
Paul, A. & Pereira, S. F., 2025, Optical Measurement Systems for Industrial Inspection XIV. Lehmann, P., Osten, W. & Goncalves, A. A. (eds.). SPIE, 7 p. 135672I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13567).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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Near-infrared coherent Fourier scatterometry for deep subsurface nanostructure metrology in silicon
Paul, A., Boonstra, M. & Pereira, S. F., 2025, In: Optics and Lasers in Engineering. 195, 8 p., 109354.Research output: Contribution to journal › Article › Scientific › peer-review
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