19982017

Research output per year

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Research Output

Deep sub-wavelength metrology for advanced defect classification

van der Walle, P., Kramer, E., van der Donck, J. C. J., Mulckhuyse, W., Nijsten, L., Bernal Arango, F. A., de Jong, A., van Zeijl, E., Spruit, H. E. T., van Den Berg, J. H., Nanda, G., Van Langen-Suurling, A. K., Alkemade, P. F. A., Pereira, S. F. & Maas, D. J., 2017, Optical Measurement Systems for Industrial Inspection X. Lehmann, P., Osten, W. & Albertazzi Gonçalves, A. (eds.). Bellingham, WA, USA: SPIE, 10 p. 103294N. (Proceedings of SPIE; vol. 10329).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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  • 4 Citations (Scopus)
    48 Downloads (Pure)

    Tapered SU8 Waveguide for Evanescent Sensing by Single–Step Fabrication

    Xin, Y., Pandraud, G., van Langen-Suurling, A. & French, P., 2017, Proceedings of IEEE Sensors Conference 2017. Piscataway, NJ: IEEE, p. 1-3 3 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  • 2 Citations (Scopus)

    Highly parallel magnetic tweezers by targeted DNA tethering

    de Vlaminck, I., Henighan, TC., van Loenhout, MTJ., Pfeiffer, I., Huijts, J., Kerssemakers, JWJ., Katan, AJ., van Langen-Suurling, AK., van der Drift, EWJM., Wyman, C. & Dekker, C., 2011, In : Nano Letters: a journal dedicated to nanoscience and nanotechnology. p. 1-5 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

    70 Citations (Scopus)

    Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry

    Alkemade, PFA., Sidorkin, VA., Chen, P., van der Drift, EWJM., van Langen-Suurling, AK., Maas, D. & Veldhoven, E. V., 2010, In : Microscopy and Analysis. 24, 7, p. ?-?

    Research output: Contribution to journalArticleScientificpeer-review

    Towards 2-10 nm electron-beam lithography: a quantitative approach

    Sidorkin, VA., van Run, AJ., van Langen-Suurling, AK., Grigorescu, AE. & van der Drift, EWJM., 2008, In : Microelectronic Engineering. 85, p. 805-809 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)