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Research Output

Open Access
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  • 33 Downloads (Pure)

    Local versus Global Optimization of Electron Lens System Design

    Nezhad, N. H. M., Niasar, M. G., Hagen, C. W. & Kruit, P., 2020, 6th International Conference on Optimization and Applications, ICOA 2020 - Proceedings. Hachimi, H., Kaicer, M., Addaim, A. & Melliani, S. (eds.). Piscataway, NJ, USA: Institute of Electrical and Electronics Engineers (IEEE), 9094475

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
    File
  • 15 Downloads (Pure)

    Understanding the influence of 3D sidewall roughness on observed line-edge roughness in scanning electron microscopy images

    Van Kessel, L., Huisman, T. & Hagen, C. W., 2020, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIV. Adan, O. & Robinson, J. C. (eds.). SPIE, Vol. 11325. 17 p. 113250Z

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
    File
  • 18 Downloads (Pure)

    ‘Cleanroom’ in SEM

    Jeevanandam, G., van der Meijden, V., Birnie, L. D., Kruit, P. & Hagen, C. W., 2020, In : Microelectronic Engineering. 224, 7 p., 111239.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
  • 1 Downloads (Pure)

    A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography

    Hari, S., Verduin, T., Kruit, P. & Hagen, C. W., 2019, In : Micro and Nano Engineering. 4, p. 1-6

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
  • 1 Citation (Scopus)
    71 Downloads (Pure)

    Activities

    • 1 Consultancy
    • 1 Talk or presentation at a conference

    Statisch geladen

    C.W. Hagen (Advisor)

    2002 → …

    Activity: Consultancy

    Electron-beam-induced deposition of sub-10 nanometer structures

    C.W. Hagen (Speaker)

    16 Sep 2002 → …

    Activity: Talk or presentationTalk or presentation at a conference