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Research Output

Low power AlGaN/GaN MEMS pressure sensor for high vacuum application

Sun, J., Hu, D., Liu, Z., Middelburg, L. M., Vollebregt, S., Sarro, P. M. & Zhang, G., 2020, In : Sensors and Actuators, A: Physical. 314, p. 1-7 7 p., 112217.

Research output: Contribution to journalArticleScientificpeer-review