E.W.J.M. van der Drift

Search results

• 2012

  Nano-engineering with a focused helium ion beam

  Maas, D. J., van der Drift, EWJM., Veldhoven, E. V., Meessen, JH., Rudneva, M. & Alkemade, PFA., 2012, MRS Online Proceedings Library. Marletta, G., Öztarhan, A., Baglin, J. & Ila, D. (eds.). s.l.: Cambridge University Press, p. 1-14 14 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  12 Citations (Scopus)
• 2009

  Effect of Laser Deflection on Resonant Cantilever Sensors

  Yang, CK., Bossche, A., French, PJ., Sadeghian Marnani, H., Goosen, JFL., van Keulen, F., Babaei Gavan, K., van der Zant, HSJ. & van der Drift, EWJM., 2009, Proceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand. Makhopadhyay, S.C. (ed.). IEEE Society, p. 869-872 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

  • Sensor 100%
  • Deflection 100%
  • lasers 100%
  • sensors 100%
  • Laser Beam 50%
  3 Citations (Scopus)

• Effect of pressure on the Q factor and resonance frequency of SiN microcantilevers

  Babaei Gavan, K., van der Heijden, J., van der Drift, EWJM. & van der Zant, HSJ., 2009, Proceedings of the 2009 4th IEEE International. Brugger, J. Rooij, N.F., H. Y. (ed.). Shenzhen, China: IEEE, p. 380-384 5 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

  Babaei Gavan, K., Westra, HJR., van der Drift, EWJM., Venstra, WJ. & van der Zant, HSJ., 2009, Microelectronic engineering. Rossum, van, M. (ed.). Europa: Elsevier, p. 1216-1218 3 p. (Microelectronic Engineering; vol. 86).

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  11 Citations (Scopus)

• Local digital etching and infiltration for tuning of a H1-cavity in deeply etched InP/InGaAsP/InP photonic crystals

  Kicken, HHJE., Alkemade, PFA., van der Heijden, RW., Karouta, F., Notzel, R., van der Drift, EWJM. & Salemink, HWM., 2009, Local digital etching and infiltration for tuning of a H1-cavity in deeply etched InP/InGaAsP/InP photonic crystals. s.n. (ed.). New York: IEEE Society, p. 31-34 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access

• Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments

  Babaei Gavan, K., van der Heijden, J., van der Drift, EWJM. & van der Zant, HSJ., 2009, Sensors, IEEE 2009. Evgeny Katz (ed.). IEEE Society, p. 1837-1840 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  2 Citations (Scopus)

• Surface contamination induced resonance frequency shift of cantilevers

  Sadeghian, H., Yang, CK., Babaei Gavan, K., Goosen, JFL., van der Drift, EWJM., van der Zant, HSJ., French, PJ., Bossche, A. & van Keulen, F., 2009, Proceedings 2009, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. s.n. (ed.). Tokyo, Japan: IEEE, p. 396-399 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  5 Citations (Scopus)
• 2008

  Fabrication, measurement and tuning of a photonic crystal H1-cavity in deeply

  Kicken, HHJ., Barbu, I., Gabriels, J., van der Heijden, RW., Nötzel, R., Karouta, F., Salemink, HWM. & van der Drift, EWJM., 2008, Unknown. p. -

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Field emission for nanometre displacement sensing

  Yang, CK., le Febre, A. J., Pandraud, G., van der Drift, EWJM. & French, PJ., 2008, Proceedings of the 4th Asia pacific conference on transducers and micro/nano technologies (APCOT, 2008). s.n. (ed.). s.l.: apcot, p. 200-203 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Further investigation of hydrogen silsesquioxane e-beam resist as etching mask for cryogenic silicon etching

  Yang, CK., Pandraud, G., Babaei Gavan, K., van der Drift, EWJM. & French, PJ., 2008, Proceedings of SAFE 2008. s.n. (ed.). veldhoven,the netherlands: STW, p. 527-530 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Investigation of hydrogen silsesquioxane E-beam resist as etching mask for cryogenic silicon etching

  Yang, CK., Pandraud, G., Babaei Gavan, K., van der Drift, EWJM. & French, PJ., 2008, Proceedings of APCTP-ASEAN workshop on Advanced Material Science and Nanotechnology. s.n. (ed.). Nha trang, Vietnam: APCTP-ASEAN, p. 1088-1092 5 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
• 2007

  Field emission as transducer for sub-micron and nano resonators

  Yang, CK., French, PJ., van der Drift, EWJM., Kim, JR. & Hadley, P., 2007, Proceedings of the 5th IEEE Conference on Sensors 2006. Lee, S. & Esashi, M. (eds.). Piscataway: IEEE Society, p. 1207-1210 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Field Emission for Cantilever Sensing

  Yang, CK., le Fèbre, A. J., Pandraud, G., van der Drift, EWJM. & French, PJ., 2007, Safe 2007. French, P. J. (ed.). Utrecht: Technology Foundation, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Field emission for sensor applications

  Yang, CK., van der Drift, EWJM. & French, PJ., 2007, Field emission for sensor applications. Meyer, G. C. M. (ed.). Zeist, The Netherlands: Sense of Contact 2009, p. 1-6 6 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)

  Rajaraman, V., Craciun, G., Yang, H., van der Drift, EWJM. & French, PJ., 2007, SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures. s.n. (ed.). Veldhoven, The Netherlands: SAFE, p. 617-620 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
• 2006

  2D InP photonic crystal fabrication process development

  Rong, B., van der Drift, EWJM., Salemink, HWM. & van der Heijden, RW., 2006, Nanoengineering; Fabrication, Properties, Optics and Devices III. Dobisz, E. A. & Eldada, L. A. (eds.). bellingham: SPIE, p. -

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  6 Citations (Scopus)

• Deep hole InP photonic crystals infiltrated with solid polymers and liquid crystals

  Carlstrom, CF., van der Heijden, R., Kjellander, C., van der Heijden, RW., Bastiaansen, CWM., Broer, DJ., Karouta, F., Notzel, R., van der Drift, EWJM. & Salemink, HWM., 2006, Deep hole InP photonic crystals infiltrated with solid polymers and liquid crystals. S.N. (ed.). SPIE, p. -

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Feasibility study on Field Emission Nano-Tip for Sensors (U-SP-2-I-ICT)

  Yang, CK., French, PJ. & van der Drift, EWJM., 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. STW (ed.). Veldhoven: s.l., p. 404-407 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals

  van der Heijden, R., Kjellander, C., Carlstrom, CF., Snijders, J., Kicken, H., van der Heijden, RW., Bastiaansen, CWM., Broer, DJ., Karouta, F., Notzel, R., van der Drift, EWJM. & Salemink, HWM., 2006, Tuning the Optic response of Photonic Bandgap Stuctures III. Paul V Braun & Sharon Weiss (eds.). Washington: SPIE, p. -

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals

  van der Heijden, RW., Kjellander, BKC., Carlstrom, CF., Snijders, JAP., Kicken, HHJE., Bastiaansen, CWM., Broer, DJ., Karouta, F., Notzel, R., van der Drift, EWJM. & Salemink, HWM., 2006, Proc. SPIE. s.n. (ed.). s.l.: s.n., p. 1-8 8 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 6322).

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Two-dimensional photoni crystals from semiconductor material with polymer filled holes

  van der Heijden, R., Kjellander, C., Carlstrom, CF., Snijders, J., van der Heijden, RW., Bastiaansen, CWM., Broer, DJ., Karouta, F., Notzel, R., van der Drift, EWJM. & Salemink, HWM., 2006, Photoni Crystal Materials and Devices III. de la Rue, R. M., Viktorovitch, P., Lopez, C. & Midrio, M. (eds.). Washington: SPIE, p. -

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2005

  Cl-2/O-2- and Cl-2/N-2-based inductively coupled plasma etching of photonic crystals in InP: Sidewall passivation

  van der Heijden, R., Carlstrom, CF., van der Drift, EWJM., van der Heijden, RW., Notzel, R., Veldhoven, R., Karouta, F., Salemink, HWM. & Talneau, A., 2005, 2005 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS. s.n. (ed.). Glasgow, Scotland: IEEE Society, p. 315-318 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  1 Citation (Scopus)

• Field-emission nano-tip for microresonator detection

  Yang, CK., Pandraud, G., van der Drift, EWJM. & French, PJ., 2005, Proceedings of the STW programs. s.n. (ed.). Utrecht: STW, p. 181-185 5 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• On detection of micro and submicron cantilevers

  Yang, CK., Babaei Gavan, K., Pandraud, G., Katan, AJ., van der Drift, EWJM. & French, PJ., 2005, Proceedings of the 16th MME MicroMechanics Europe Workshop. s.n. (ed.). s.l.: s.n., p. 316-319 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2004

  Cl2-based inductively coupled plasma etching of photonic crystals in InP,

  van der Heijden, RW., Carlström, CF., Andriesse, MSP., van der Drift, EWJM., Geluk, EJ., Karouta, F., Nouwens, P., Oei, YS., de Vries, T. & Salemink, HWM., 2004, Proceedings Symposium IEEE=LEOS Benelux chapter, 2004. Mortiier, G. & van Daele, P. (eds.). IEEE Society, p. 287-290 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Deep dry etching process development for photonic crystals in InP-based planar waveguides

  van der Heijden, RW., Andriesse, MSP., Carlström, CF., van der Drift, EWJM., Geluk, EJ., Karouta, F., Nouwens, P., Oei, YS., de Vries, T. & Salemink, HWM., 2004, Photonic Crystal materials and nanostructures- proceedings of SPIE volume 5450. Rue, R. D. L., Viktorovitch, P., Clivia, M., Torres, S. & Midrio, M. (eds.). SPIE, p. 523-532 10 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  8 Citations (Scopus)

• Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

  Craciun, G., Yang, H., Pakula, L., van der Drift, EWJM. & French, PJ., 2004, ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004. KAWAMURA, T., LEE, E-W., Lu, Y. & James, K. (eds.). Tokyo, Japan: The Institute of the Electrical Engineers of Japan, p. 174-178 5 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2003

  Deep dry etching process development for InP-based photonic crystals

  van der Heijden, R., van der Drift, EWJM., Geluk, EJ., van der Heijden, RW., Karouta, F., Nouwens, PAM., Oei, YS., de Vries, T. & Salemink, HWM., 2003, Proceedings 2003 Symposium of the IEEE/LEOS Benelux Chapter. de Ridder, R., Altena, G., Geuzebroek, D. & Dekker, R. (eds.). Enschede: Univerteitsdrukkerij UTwente, p. 257-260 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

  Craciun, G., Yang, H., Pakula, L., Blauw, MA., van der Drift, EWJM. & French, PJ., 2003, IEEE Sensors 2003. s.n. (ed.). Piscataway: IEEE Society, p. 440-444 5 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2002

  Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope

  Craciun, G., Yang, H., Blauw, MA., van der Drift, EWJM. & French, PJ., 2002, MME'02 micromechanics Europe. Bucharest: Nat. Inst. for Res. and Development in Microtechnologies, p. 55-58 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices

  Craciun, G., Yang, H., van Zeijl, HW., Pakula, L., Blauw, MA., van der Drift, EWJM. & French, PJ., 2002, Proceedings of SeSens 2002. Utrecht: STW Stichting voor de Technische Wetenschappen, p. 612-614 3 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2001

  1, 2 and 3 dimensional photonic materials made using ion beams: fabrication and optical density-of-states/

  de Dood, MJA., Slooff, LH., Hensen, TM., Vossen, DLJ., Moroz, A., Zijlstra, T., van der Drift, EWJM., van Blaaderen, A. & Polman, A., 2001, Proceedings of the NATO Advanced Study Institute on Photonic Crystals and Light Localization.. Soukoulis, CM. (ed.). p. 555-566 12 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures

  Cracium, G., Blauw, MA., van der Drift, EWJM. & French, PJ., 2001, Transducers '01: technical papers. Vol 1. Berlin: Springer, p. 612-615 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures.

  Craciun, G., Blauw, MA., van der Drift, EWJM. & French, PJ., 2001, Proceedings of the Transducers '01 - Eurosensors XV.. Obermeier, E. (ed.). p. 612-615 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• High aspect ratio cryogenic etching of silicon with SF6/O2 plasma

  Cracium, G., Blauw, MA., van der Drift, EWJM. & French, PJ., 2001, SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht: STW Technology Foundation, p. 783-786 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• High aspect ratio cyrogenic etching of Silicon with SF6/O2 plasma.

  Craciun, G., Blauw, MA., van der Drift, EWJM. & French, PJ., 2001, Proceedings of the 2nd Workshop on Semiconductors Sensor and Actuator Technology (SESENS).. Technologiestichting, STW. (ed.). p. 783-786 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Limitations and complementary value of cryogenic SF6-O2 and Bosch plasma etch process for silicon micromachining.

  Blauw, MA., Craciun, G., van der Drift, EWJM. & French, PJ., 2001, Proceedings of the National Dutch Sensor Symposium.. Elwenspoek, M. (ed.). p. 89-94 6 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Temperature influence on etching deep holes with SF6/O2 cryogenic plasma.

  Craciun, G., Blauw, MA., van der Drift, EWJM., Sarro, PM. & French, PJ., 2001, Proceedings of the 12th Micromechanics Europe Workshop MME.. Hill, M. (ed.). p. 62-65 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Towards the ideal nano-friction experiment.

  Frenken, JWM., Dienwiebel, M., Heimberg, JA., Zijlstra, T., van der Drift, EWJM., Spaanderman, DJ. & de Kuyper, E., 2001, Proceedings of the NATO Advanced Study Institute on "Fundamentals of Tribology: Bridging the gap between the macro- and micro- nanoscales".. Bushan, B. (ed.). p. 137-150 14 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
• 2000

  High speed anisotropic dry etching of CoNbZr for next generation magnetic recording.

  Andriesse, MSP., Zijlstra, T. & van der Drift, EWJM., 2000, Proceedings of the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofrabrication.. p. 3462-3466 5 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

  17 Citations (Scopus)

• Kinetics and crystal orientation dependence in high aspect ratio silicon dry etching.

  Blauw, MA., Zijlstra, T., Bakker, RA. & van der Drift, EWJM., 2000, Proceedings of the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofrabrication.. Melngailis, J. (ed.). p. 3453-3461 9 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

  56 Citations (Scopus)

• Radical transport in deep silicon structures during dry etching.

  Blauw, MA., Zijlstra, T. & van der Drift, EWJM., 2000, Workshop on Semiconductor Sensor and Actuator Technology (Sesens). Veen, JP. (ed.). p. 617-622 6 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
• 1999

  Chemische Abscheidung von Silber in Nanometerbereich: Grenzen und Moglichkeiten

  ten Kortenaar, MV., Kolar, ZI., Frens, G., Lusse, PJ. & van der Drift, EWJM., 1999, Berichtsband uber das 21. Ulmer Gesprach. Saulgau/Wurtt: Eugen G. Leuze Verlag, p. 19-29 11 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.

  Zijlstra, T., van der Drift, EWJM., de Dood, MJA., Snoeks, E. & Polman, A., 1999, Proceedings 43rd Int. Conference on Electron, Ion and Photon Beam Technology and Nanofabrication. Wolfe, J. (ed.). p. 2734-2739 6 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

  100 Citations (Scopus)

• Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.

  Zijlstra, T., van der Drift, EWJM., de Dood, MJA., Snoeks, E. & Polman, A., 1999, International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication.. Wolfe, J. (ed.). p. -

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Plasma induced charging damage of gate oxides.

  van Veen, RG., Verbruggen, AH., van der Drift, EWJM., Radelaar, S., Anders, S., Jaeger, HM., Wang, Z., Tanner, P., Salm, C., Mouthaan, T., Kuper, F. & Andriesse, MSP., 1999, 2nd Annual Workshop on Semiconductor Advances for Future Electronics (SAFE).. p. -

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
• 1998

  Scanning Tunneling Spectroscopy on self-assembled p-conjugated oligomers. A. comparison of experiments with electronic models

  Rosink, JJWM., Blauw, MA., Geerligs, LJ., van der Drift, EWJM. & Radelaar, S., 1998, European Conference Thin Organised Films. p. 283-284 2 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

• Size effects in flux-line solids and liquids

  Theunissen, MH., van der Drift, EWJM. & Kes, PH., 1998, Advances in Superconductivity: new materials, critical currents & devices (ASMCCD). Pinto, R., Grover, AK. & Malik, SK. (eds.). p. 314-323 10 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
• 1997

  Size effects in the electrical transport of Si/SiGe devices induced by strain relaxation

  Lukey, PW., Caro, J., Zijlstra, T., van der Drift, EWJM. & Radelaar, S., 1997, Proceedings of the Second Workshop on Innovative Circuits and Systems for Nano Electronics. p. 47-53 7 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
• 1996

  Size-effects in flow of flux-line liquids

  Theunissen, MH., van der Drift, EWJM. & Kes, PH., 1996, Proceedings of the 8th International Workshop on Critical Currents in Superconductors. p. 164-167 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific