F.A. Bernal Arango, MSc


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  • Deep sub-wavelength metrology for advanced defect classification

    van der Walle, P., Kramer, E., van der Donck, J. C. J., Mulckhuyse, W., Nijsten, L., Bernal Arango, F. A., de Jong, A., van Zeijl, E., Spruit, H. E. T., van Den Berg, J. H., Nanda, G., Van Langen-Suurling, A. K., Alkemade, P. F. A., Pereira, S. F. & Maas, D. J., 2017, Optical Measurement Systems for Industrial Inspection X. Lehmann, P., Osten, W. & Albertazzi Gonçalves, A. (eds.). Bellingham, WA, USA: SPIE, 10 p. 103294N. (Proceedings of SPIE; vol. 10329).

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
    6 Citations (Scopus)
    70 Downloads (Pure)