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  • Fabrication of Nanoslits with <111> Etching TSWE Method

    Hong, H., Ye, L., Li, K., Sarro, P. M., Zhang, G. & Liu, Z., 2021, 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). IEEE , p. 174-177 4 p. 9451489

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review