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Conference contribution

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  • 2010

    Local stress analysis in devices by FIB

    Kregting, R., Gielen, S., van Driel, W., Alkemade, PFA., Miro, H. & Kamminga, JD., 2010, 11th Int.Conf.on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE2010. s.n. (ed.). Bordeaux: IEEE Society, p. 1-5 5 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    1 Citation (Scopus)