Research output per year
Research output per year
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Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C
Vollebregt, S., Tichelaar, FD., Schellevis, H., Beenakker, CIM. & Ishihara, R., 2014, In: Carbon. 71, May, p. 249-256 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access49 Citations (Scopus) -
Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications
Golshani, N., Mohammadi, V., Schellevis, H., Beenakker, CIM. & Ishihara, R., 2014, In: APL Materials (online). 2, 10 - 100702, p. 1-9 9 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access4 Citations (Scopus) -
Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst
Vollebregt, S., Schellevis, H., Beenakker, CIM. & Ishihara, R., 2013, 2013 IEEE International Interconnect Technology Conference - Digest of technical papers. Ogawa, S. (ed.). Piscataway, NJ, USA: IEEE Society, p. 1-3 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access3 Citations (Scopus) -
Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode
Tran, AT., Moh, TSY., Pandraud, G., Schellevis, H., Akhnoukh, AB. & Sarro, PM., 2013, Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII. Morante, JR. & Hierold, C. (eds.). Piscataway, NJ, USA: IEEE Society, p. 1396-1399 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access -
Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators
Tran, AT., Wunnicke, O., Pandraud, G., Nguyen, MD., Schellevis, H. & Sarro, PM., 2013, In: Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers. 202, November, p. 118-123 6 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access23 Citations (Scopus)
Activities
- 1 Participation in conference
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Eurosensors XVIII
H. Schellevis (Participant)
2004 → …Activity: Participating in or organising an event › Participation in conference