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Research Output

  • 2 Conference contribution
  • 1 Abstract

A Wafer-Scale Process for the Monolithic Integration of CVD Graphene and CMOS Logic for Smart MEMS/NEMS Sensors

Romijn, J., Vollebregt, S., van Zeijl, H. W. & Sarro, P. M., 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, p. 260-263 4 p. 8870741

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
File
  • 1 Citation (Scopus)
    1 Downloads (Pure)

    A miniaturized low power Pirani pressure sensor based on suspended graphene

    Romijn, J., Vollebregt, S., Dolleman, R. J., Singh, M., van der Zant, H. S. J., Steeneken, P. & Sarro, P., 2018, Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Piscataway, NJ: IEEE, p. 11-14 4 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
    File
  • 5 Citations (Scopus)
    25 Downloads (Pure)

    A transfer-free approach to wafer-scale graphene deposited by chemical vapour deposition

    Vollebregt, S., Ricciardella, F., Romijn, J., Singh, M., Shi, S. & Sarro, L., 2018, p. 1-1. 1 p.

    Research output: Contribution to conferenceAbstractScientific

    Open Access
    File
    43 Downloads (Pure)