Last, T.,
Samkharadze, N.,
Eendebak, P.,
Versluis, R.,
Xue, X.,
Sammak, A.,
Brousse, D.,
Loh, K.,
Polinder, H.,
Scappucci, G.,
Veldhorst, M.,
Vandersypen, L.,
Maturová, K.,
Veltin, J. &
Alberts, G.,
2020,
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020. Sanchez, M. I. & Panning, E. M. (eds.).
SPIE,
Vol. 11324.
12 p. 113240J. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11324).
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review