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J.A. Alfaro Barrantes

20202020

Research output per year

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Research Output

  • 1 Conference contribution
  • 1 Article

Fabrication of Al-based superconducting high-aspect ratio TSVs for quantum 3D integration

Alfaro Barrantes, J., Mastrangeli, M., Thoen, D., Bueno Lopez, J., Baselmans, J. & Sarro, L., 1 Jan 2020, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Vol. 2020-January. p. 932-935 4 p. 9056165

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
File
  • 2 Downloads (Pure)

    Superconducting High-Aspect Ratio Through-Silicon Vias with DC-Sputtered Al for Quantum 3D integration

    Alfaro Barrantes, J., Mastrangeli, M., Thoen, D., Visser, S., Bueno Lopez, J., Baselmans, J. & Sarro, L., Jul 2020, In : IEEE Electron Device Letters. 41, 7, p. 1114-1117 4 p.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
  • 1 Citation (Scopus)
    48 Downloads (Pure)