Romijn, J.,
Vollebregt, S.,
May, A.,
Erlbacher, T.,
van Zeijl, H. W.,
Leijtens, J.,
Zhang, G. &
Sarro, P. M.,
2022,
Proceedings of the 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). Danvers:
IEEE,
p. 535-538 4 p. 9699533
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review