K.T. Arat – Research output — TU Delft Research Portal

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5 Article
3 Conference contribution
1 Dissertation (TU Delft)

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2021
Simulation of Electron-Matter Interaction in Electron Beam Lithography and Metrology
Arat, K. T., 2021, 198 p.
Research output: Thesis › Dissertation (TU Delft)

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