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  • 2023

    3D Integration for Modular Quantum Computer based on Diamond Spin Qubits

    Ishihara, R., Hermias, J., Neji, S., Yu, K. Y., Van Der Maas, M., Nur, S., Iwai, T., Miyatake, T., Miyahara, S. & More Authors, 2023, Proceedings of the 2023 IEEE International Interconnect Technology Conference and IEEE Materials for Advanced Metallization Conference, IITC/MAM 2023. Piscataway: IEEE, 3 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
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  • 2021

    3D Integration Technology for Quantum Computer based on Diamond Spin Qubits

    Ishihara, R., Hermias, J., Yu, S., Yu, K. Y., Nur, S., Iwai, T., Miyatake, T., Kawaguchi, K., Doi, Y., Sato, S. & LI, Y., 2021, 2021 IEEE International Electron Devices Meeting, IEDM 2021. IEEE, p. 14.5.1-14.5.4 (Technical Digest - International Electron Devices Meeting, IEDM; vol. 2021-December).

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    1 Citation (Scopus)