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L. Šiaudinyte



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Research Output

  • 1 Conference contribution
  • 1 Article

Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry

Siaudinyte, L. & Pereira, S. F., Oct 2020, In : Measurement Science and Technology. 31, 10, 6 p., 104005.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
  • 1 Downloads (Pure)

    Wavelength influence on the determination of subwavelength grating parameters by using optical scatterometry

    Siaudinyte, L. & Pereira, S. F., 2020, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIV. Adan, O. & Robinson, J. C. (eds.). SPIE, Vol. 11325. 8 p. 113252M

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
  • 15 Downloads (Pure)