No photo of L. Šiaudinyte

L. Šiaudinyte

Dr.

20202020

Research output per year

If you made any changes in Pure these will be visible here soon.

Fingerprint Dive into the research topics where L. Šiaudinyte is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 5 Similar Profiles

Research Output

  • 1 Conference contribution

Wavelength influence on the determination of subwavelength grating parameters by using optical scatterometry

Siaudinyte, L. & Pereira, S. F., 2020, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIV. Adan, O. & Robinson, J. C. (eds.). SPIE, Vol. 11325. 8 p. 113252M

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
File
  • 15 Downloads (Pure)