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L. Šiaudinyte



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Research Output

  • 1 Conference contribution

Wavelength influence on the determination of subwavelength grating parameters by using optical scatterometry

Siaudinyte, L. & Pereira, S. F., 2020, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIV. Adan, O. & Robinson, J. C. (eds.). SPIE, Vol. 11325. 8 p. 113252M

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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