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  • 2020

    Understanding the influence of 3D sidewall roughness on observed line-edge roughness in scanning electron microscopy images

    Van Kessel, L., Huisman, T. & Hagen, C. W., 2020, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIV. Adan, O. & Robinson, J. C. (eds.). SPIE, Vol. 11325. 17 p. 113250Z. (METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIV).

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
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    1 Citation (Scopus)
    44 Downloads (Pure)
  • 2019

    Surface effects in simulations of scanning electron microscopy images

    Van Kessel, L., Hagen, C. W. & Kruit, P., 2019, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIII. Ukraintsev, V. A. & Adan, O. (eds.). SPIE, Vol. 10959. 16 p. 109590V. (Metrology, Inspection, and Process Control for Microlitography XXXIII).

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
    File
    1 Citation (Scopus)
    59 Downloads (Pure)