L.C.P.M. van Kessel – Research output — TU Delft Research Portal

5 Article
2 Conference contribution
1 Dissertation (TU Delft)

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Conference contribution
Surface effects in simulations of scanning electron microscopy images
Van Kessel, L., Hagen, C. W. & Kruit, P., 2019, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIII. Ukraintsev, V. A. & Adan, O. (eds.). SPIE, Vol. 10959. 16 p. 109590V. (Metrology, Inspection, and Process Control for Microlitography XXXIII).
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Open Access
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1 Citation (Scopus)

78 Downloads (Pure)
Understanding the influence of 3D sidewall roughness on observed line-edge roughness in scanning electron microscopy images
Van Kessel, L., Huisman, T. & Hagen, C. W., 2020, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIV. Adan, O. & Robinson, J. C. (eds.). SPIE, Vol. 11325. 17 p. 113250Z. (METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIV).
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Open Access
File
1 Citation (Scopus)

117 Downloads (Pure)