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Research Output

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Conference contribution
2016

Optimisation of Bio-medical Optical Waveguide

Xin, Y., Pandraud, G., Pakula, L., Morana, B. & French, P. J., 2016, 2016 IEEE NEMS Conference. Matsushima, Japan: IEEE, p. 477 - 480 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2015

A 0.05mm2 1V capacitance-to-digital converter based on period modulation

He, Y., Chang, ZY., Pakula, L., Heidary Shalmany, S. & Pertijs, MAP., 2015, Proceedings of the 2015 IEEE International Solid-State Circuits Conference. Romdhane, M., Fujino, LC. & Anderson, J. (eds.). Piscataway, NJ, USA: IEEE Society, p. 486-487 2 p. (IEEE International Solid State Circuits Conference. Digest of Technical Papers; vol. 48).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
2012

Flexible implantable sensors for long term blood pressure and blood flow measurements

Pakula, L., Trimp, PJ. & French, PJ., 2012, Proceedings 2012 IEEE 6th Asia-Pacific Conference on Transducers and Micro-Nano Technology. Huang, Q-A. & Xia, S. (eds.). SL: s.n., p. 1-2 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2011

Post-operative wireless implants for monitoring, detection and treatment

Subbaiyan, D., Pakula, L., French, PJ., Lange, JF., Jeekel, J., Kleinrensink, GJ., Sterenborg, HJC., Robinson, DJ., van Zaane, F., kaptein, JG., Tang, K., Pandraud, G., van Veen, J., Draaier, M. & Vakalapoulos, KA., 2011, 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). Bao, M. & Fan, L-S. (eds.). Beijing, China: IEEE Society, p. 2192-2195 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
2009

A versatile CMOS compatible PECVD silicon carbide MEMS technology

Pakula, L., Rajaraman, V. & French, PJ., 2009, A versatile CMOS compatible PECVD silicon carbide MEMS technology. s.n. (ed.). Chennai, India: ICMEMS, p. 0-4 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide

Rajaraman, V., Pakula, LS., Pham, HTM., Sarro, PM. & French, PJ., 2009, Proc. IEEE MEMS 2009. Sarro, PM. & Hierold, C. (eds.). Sorrento, Italy: IEEE Society, p. 140-143 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

9 Citations (Scopus)

SOI digital accelerometer based on pull-in time configuration

Pakula, L., Rajaraman, V. & French, PJ., 2009, SOI digital accelerometer based on pull-in time configuration. s.n. (ed.). shenzhen, p.r.china: IEEE NEMS, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
2008

3D SiC CMOS compatible surface micromachined accelerometer

Pakula, L., Yang, H. & French, PJ., 2008, Proceedings of APCOT 2008. s.n. (ed.). Tainan, Taiwan: IEEE Society, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

3-D silicon carbide surface micromachined accelerometer compatible with CMOS processing

Pakula, L., Yang, H. & French, PJ., 2008, Proceedings of ASDAM 2008. s.n. (ed.). smolenice,slovakia: Slovak Academy of Sciences, p. 227-230 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

4 Citations (Scopus)

Application of PECVD a-SiC thin-film layer for encapsulation of microstructures

Rajaraman, V., Pakula, L., Pham, HTM., Sarro, PM. & French, PJ., 2008, The annual workshop on semiconductor advances for future electronics and sensors. s.n. (ed.). Veldhoven, the Netherlands: STW, p. 609-612 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

A thin-SOI micromachined quasi-digital accelerometer

Pakula, L., Rajaraman, V. & French, PJ., 2008, Proceedings Eurosensors XXII. s.n. (ed.). dresde,germany: Eurosensors, p. 201-205 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Fabrication of accelerometers by thin-SOI micromachining

Rajaraman, V., Pakula, L., Makinwa, KAA. & French, PJ., 2008, Proceedings of sense of contact X. s.n. (ed.). zeist,the netherlands: Sense of contact X, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Fabrication of accelerometers by thin-SOI micromachining

Rajaraman, V., Pakula, L., Makinwa, KAA. & French, PJ., 2008, Proceedings of sense of contact X. s.n. (ed.). zeist,the netherlands: Sense of contact X, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Thin-film MEMS encapsulation using low-stress PECVD silicon carbide

Rajaraman, V., Pakula, L., Pham, HTM., Sarro, PM. & French, PJ., 2008, Proceedings Eurosensors XXII. Gerlach, G. (ed.). Dresden, Germany: Eurosensors, p. 491-494 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Thin-SOI digital accelerometer employin pull-in time mode configuration

Pakula, L., Rajaraman, V. & French, PJ., 2008, Proceedings of SAFE 2008. s.n. (ed.). veldhoven,the netherlands: SAFE, p. 420-423 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

2007

A dome-shape bio-inspired piezoresistive MEMS strain sensor

Wicaksono, DHB., Pandraud, G., Pakula, L., Rajaraman, V., French, PJ. & Vincent, JFV., 2007, Proceedings of the International Conference on Electrical Engineering and Informatics (ICEEI2007). s.n. (ed.). Bandung: Institut Teknologi Bandung, p. 464-467 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Modelling, design and fabrication of a bio-inspired MEMS vibratory gyroscope

Chen, Y., Wicaksono, DHB., Pakula, L., Rajaraman, V. & French, PJ., 2007, Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007. s.n. (ed.). s.l.: MME, p. 199-202 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Modelling, design and fabrication of a bio-inspired MEMS vibratory gyroscope (U_SP_2_I_IC_T)

Chen, Y., Wicaksono, DHB., Pakula, L., Rajaraman, V. & French, PJ., 2007, Modelling, design and fabrication of a bio-inspired MEMS vibratory gyroscope.. s.l. (ed.). Veldhoven, The Netherlands.: SAFE, p. 572-576 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Post-processing micromachined pull-in accelerometer

Pakula, L. & French, PJ., 2007, Proceedings of Transducers 2007. s.n. (ed.). Washington D.C.: IEEE Society, p. 1171-1174 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1 Citation (Scopus)
2006

A pull-in operation mode accelerometer (U_SP_2_I_IC_T)

Pakula, L. & French, PJ., 2006, Proceedings of the 5th IEEE Conference on Sensors 2006. s.n. (ed.). Piscataway: IEEE Society, p. 1127-1130 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

6 Citations (Scopus)

Low Voltage, High Speed RF-Switch with High On-Off Capacitance Ratio (U-SP-2-I-ICT)

Pakula, L., French, PJ. & Yang, H., 2006, Proceedings of APCOT 2006. s.n. (ed.). Singapore.: apcot, p. 1-5 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

2005

Investigation of multi-sensor techniques for cardiac-output measurements in intensive care

Tanase, D., Iliev, BP., Goosen, JFL., Chang, ZY., Pop, GAM., Verwiel, JMM., Slager, CJ., Pakula, L., Meijer, GCM. & French, PJ., 2005, Proceedings of the 3rd annual International IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. s.n. (ed.). Piscataway: IEEE Society, p. 122-125 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

Low voltage, high speed RF switch with high switching capacitance ratio (U-SP-2-I-ICT)

Pakula, L., French, PJ. & Yang, H., 2005, Low voltage, high speed RF switch with high switching capacitance ratio. s.n. (ed.). Irvine,CA,USA.: s.l., p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Low voltage high speed rf switch

Pakula, L., Yang, H. & French, PJ., 2005, Eurosensors XIX, proceedings. R Reus, D. & S Bouwstra (eds.). Piscataway: IEEE Society, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)

Optical measurements on drain fluid for the detection of anastomotic leakage

Pakula, L., Tanase, D., de Graaf, G., French, PJ., Kraal, K. & Lange, JF., 2005, Proceedings of the 3rd annual International IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. s.n. (ed.). Piscataway: IEEE Society, p. 72-75 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)

Polarization-insensitive PECVD SiC waveguides for photonic sensing

Pandraud, G., Pham, TMH., Pakula, L., Sarro, PM. & French, PJ., 2005, 17th International Conference on Optical Fibre Sensors. Voet, M., Willsch, R., Ecke, W., Jones, J. & Culshaw, B. (eds.). Bellingham: SPIE, p. 836-839 4 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 5855).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
1 Citation (Scopus)
2004

A novel ull-in accelerometer

Pakula, L., Yang, H. & French, PJ., 2004, ICEE 2004; Coference proceedings of the international conference on electrical engineering 2004 joint conference with AsiPcific conference of tranducers and micro-nano technology 2004. Tokyo: ICEE, p. 163-167 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

CMOS compatible pressure sensors: a comparison between SiC and SiN

Pakula, L., Yang, H., French, PJ. & Sarro, PM., 2004, SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics. Utrecht: STW Technology Foundation, p. 769-773 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Nanochannels in Glass with Poly-Silicon Electrodes

Kutchoukov, VG., Pakula, L., Parikesit, GOF., Garini, Y., Nanver, LK. & Bossche, A., 2004, Technical Digest of Eurosensors XVIII. s.n. (ed.). s.l.: s.n., p. 32-35 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Nanofluidic devices in glass with Poly-Si electrodes

Kutchoukov, VG., Pakula, L., Parikesit, GOF., Nanver, LK. & Bossche, A., 2004, SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics. s.n. (ed.). Utrecht: STW Technology Foundation, p. 764-768 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

SiC micromachined Mach-Zehnder interferometer on silicon for pressure sensor

Pandraud, G., Pakula, L., Pham, TMH., French, PJ. & Sarro, PM., 2004, SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics. Utrecht: STW Technology Foudation, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

SiC passive optomechanical transducer head for sensor applications

Pandraud, G., Pakula, L., Pham, HMT., French, PJ. & Sarro, PM., 2004, Digest of technical papers; XVIII Eurosensors. Rome: University of Rome, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

Craciun, G., Yang, H., Pakula, L., van der Drift, EWJM. & French, PJ., 2004, ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004. KAWAMURA, T., LEE, E-W., Lu, Y. & James, K. (eds.). Tokyo, Japan: The Institute of the Electrical Engineers of Japan, p. 174-178 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Surface micromachined CMOS compatible vertical accelerometer

Pakula, L., Yang, H. & French, PJ., 2004, The sense of contact 6: where industry meets science workshop sensortechnology. S.l.: s.n., p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

2003

A CMOS compatible SiC accelerometer

Pakula, L., Yang, H. & French, PJ., 2003, IEEE Sensors 2003. s.n. (ed.). Piscataway: IEEE Society, p. 761-764 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

15 Citations (Scopus)

A novel pull-in accelerometer

Yang, H., Pakula, L. & French, PJ., 2003, EUROSENSORS 17th European conference on solid-state transducers. s.n. (ed.). Guimarães: University of Minho, p. 204-207 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

A novel RF switch with low driving voltage

Pakula, L., Yang, H. & French, PJ., 2003, SAFE 2003 Semiconductor advances for future electronics. s.n. (ed.). Utrecht: Stichting voor de Technische Wetenschappen, p. 753-756 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Design of a novel electrostatic switch with low operating voltage and high speed

Yang, H., Pakula, L. & French, PJ., 2003, MME 2003 14th Micromechanics Europe workshop. s.n. (ed.). s.l.: s.n., p. 33-36 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Electromechanical optical attenuation in micromachined SiC waveguids

Pandraud, G., Yang, H., Pakula, L., Pham, TMH., French, PJ. & Sarro, PM., 2003, SAFE 2003 Semiconductor advances for future electronics. s.n. (ed.). Utrecht: Stichting voor de Technische Wetenschappen, p. 631-634 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Fabrication of a CMOS compatibile pressure sensor for harsh environments

Pakula, L., Yang, H., Pham, TMH., French, PJ. & Sarro, PM., 2003, MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems. s.n. (ed.). Piscataway: IEEE Society, p. 502-505 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Fabrication of a CMOS compatible vertical accelerometer

Pakula, L., Yang, H., Pham, TMH., Sarro, PM. & French, PJ., 2003, EUROSENSORS 17th European conference on solid-state transducers. s.n. (ed.). Guimarães: University of Minho, p. 635-638 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Fabrication of nanochannels using glass to glass anodic bonding

Kutchoukov, VG., Laugere, FPJ., van der Vlist, W., Pakula, L., Garini, Y., Alkemade, PFA. & Bossche, A., 2003, TRANSDUCERS'03 Twelfth international conference on solid-state sensors, actuators and microsystems. s.n. (ed.). Piscataway: IEEE Society, p. 1327-1330 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Fabrication technology for nanofluidic channel devices for biochemical applications

Kutchoukov, VG., Pakula, L., Garini, Y., Mollinger, JR. & Bossche, A., 2003, MME 2003 14th Micromechanics Europe workshop. s.n. (ed.). s.l.: s.n., p. 167-170 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Fabrication technology for twin nanochannels

Kutchoukov, VG., Pakula, L., Mollinger, JR. & Bossche, A., 2003, EUROSENSORS 17th European conference on solid-state transducers. s.n. (ed.). Guimarães: University of Minho, p. 623-626 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

Craciun, G., Yang, H., Pakula, L., Blauw, MA., van der Drift, EWJM. & French, PJ., 2003, IEEE Sensors 2003. s.n. (ed.). Piscataway: IEEE Society, p. 440-444 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Nanochannel fabrication technique for fluidic applications

Kutchoukov, VG., Pakula, L., Garini, Y., Mollinger, JR. & Bossche, A., 2003, SAFE 2003 Semiconductor advances for future electronics. s.n. (ed.). Utrecht: Stichting voor de Technische Wetenschappen, p. 702-706 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Polyimide sacrificial layer for an all-dray post-process surface micromachining module

Pham, TMH., Bagolini, A., de Boer, CR., Laros, JMW., Pakula, L., French, PJ. & Sarro, PM., 2003, Transducers'03 Digest of technical papers. Piscataway: IEEE Society, p. 813-816 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Polymide sacrificial layer for an all-dry post-process surface micromachining module

Pham, TMH., Bagolini, A., de Boer, CR., Laros, JMW., Pakula, L., French, PJ. & Sarro, PM., 2003, TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems. s.n. (ed.). Piscataway: IEEE Society, p. 813-816 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Processing of inertial sensors using SF6-O2 Cryogenic plasma process

Craciun, G., Yang, H., Pakula, L. & Blauw, MA., 2003, SAFE 2003 Semiconductor advances for future electronics. s.n. (ed.). Utrecht: Stichting voor de Technische Wetenschappen, p. 683-686 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Stiction of surface micromachined structures: a study of the problem and the possible solutions

Pham, TMH., Pakula, L., French, PJ. & Sarro, PM., 2003, SAFE 2003 Semiconductor advances for future electronics. s.n. (ed.). Utrecht: Stichting voor de Technische Wetenschappen, p. 711-715 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review