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Research Output

2020

Beam displacement and blur caused by fast electron beam deflection

Zhang, L., Garming, M. W. H., Hoogenboom, J. P. & Kruit, P., 2020, In : Ultramicroscopy. 211, 7 p., 112925.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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4 Downloads (Pure)

Local versus Global Optimization of Electron Lens System Design

Nezhad, N. H. M., Niasar, M. G., Hagen, C. W. & Kruit, P., 2020, 6th International Conference on Optimization and Applications, ICOA 2020 - Proceedings. Hachimi, H., Kaicer, M., Addaim, A. & Melliani, S. (eds.). Piscataway, NJ, USA: Institute of Electrical and Electronics Engineers (IEEE), 9094475

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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15 Downloads (Pure)

Miniature electron beam separator based on three stacked dipoles

Krielaart, M. A. R., Maas, D. J., Loginov, S. V. & Kruit, P., 2020, In : Journal of Applied Physics. 127, 23, 12 p., 234904.

Research output: Contribution to journalArticleScientificpeer-review

Transmission imaging on a scintillator in a scanning electron microscope

Zuidema, W. & Kruit, P., 2020, In : Ultramicroscopy. 218, 9 p., 113055.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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2 Downloads (Pure)

‘Cleanroom’ in SEM

Jeevanandam, G., van der Meijden, V., Birnie, L. D., Kruit, P. & Hagen, C. W., 2020, In : Microelectronic Engineering. 224, 7 p., 111239.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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1 Downloads (Pure)
2019

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Kruit, P. & Naftali, R., 2019, IPC No. H01J, Patent No. US 10,395,887, Priority date 20 Feb 2018

Research output: Patent

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Kruit, P. & Naftali, R., 2019, IPC No. H01J, Priority date 20 Feb 2018, Priority No. WO 2019/164392

Research output: Patent

A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography

Hari, S., Verduin, T., Kruit, P. & Hagen, C. W., 2019, In : Micro and Nano Engineering. 4, p. 1-6

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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1 Citation (Scopus)
71 Downloads (Pure)

Design and simulation of a linear electron cavity for quantum electron microscopy

Turchetti, M., Kim, C. S., Hobbs, R., Yang, Y., Kruit, P. & Berggren, K. K., 2019, In : Ultramicroscopy. 199, p. 50-61

Research output: Contribution to journalArticleScientificpeer-review

Estimating Step Heights from Top-Down SEM Images

Arat, K. T., Bolten, J., Zonnevylle, A. C., Kruit, P. & Hagen, C. W., 2019, In : Microscopy and Microanalysis. 25, 4, p. 903-911 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
1 Citation (Scopus)
13 Downloads (Pure)
Open Access
File
1 Citation (Scopus)
88 Downloads (Pure)

Multi electron beam inspection apparatus

Kruit, P., 2019, IPC No. H01J, Patent No. CNZL201580057918.2, Priority date 4 Sep 2014

Research output: Patent

Photoemission sources and beam blankers for ultrafast electron microscopy

Zhang, L., Hoogenboom, J. P., Cook, B. & Kruit, P., 2019, In : Structural Dynamics. 6, 5, 051501.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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1 Citation (Scopus)
43 Downloads (Pure)

Pulse length, energy spread, and temporal evolution of electron pulses generated with an ultrafast beam blanker

Weppelman, I. G. C., Moerland, R. J., Zhang, L., Kieft, E., Kruit, P. & Hoogenboom, J. P., 2019, In : Structural Dynamics. 6, 2, 12 p., 024102.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
2 Citations (Scopus)
74 Downloads (Pure)

Signal separator for a multi-beam charged particle inspection apparatus

Kruit, P. & Naftali, R., 2019, IPC No. H01J, Priority date 20 Feb 2018, Priority No. WO2019/164391

Research output: Patent

Signal separator for a multi-beam charged particle inspection apparatus

Kruit, P. & Naftali, R., 2019, IPC No. H01J, Priority date 20 Feb 2018, Priority No. WO2019/164391

Research output: Patent

Signal separator for Multi electron beam inspection apparatus

Kruit, P. & Naftali, R., 2019, IPC No. H01J, Patent No. US 10,504,687, Priority date 20 Feb 2018

Research output: Patent

Statistical Coulomb interactions in multi-beam SEM

Stopka, J. & Kruit, P., 2019, In : International Journal of Modern Physics A. 1942021.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Surface effects in simulations of scanning electron microscopy images

Van Kessel, L., Hagen, C. W. & Kruit, P., 2019, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIII. Ukraintsev, V. A. & Adan, O. (eds.). SPIE, Vol. 10959. 16 p. 109590V

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
File
53 Downloads (Pure)

Surface effects in simulations of scanning electron microscopy images

Van Kessel, L., Hagen, C. W. & Kruit, P., 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 4, 10 p., 044002.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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29 Downloads (Pure)
2018

Aberration correcting device for an electron microscope and an electron microscope comprising such a device

Kruit, P., 2018, IPC No. H01J, Priority date 22 Jul 2016, Priority No. WO 2018016961 A1

Research output: Patent

Brightness measurements of the nano-aperture ion source

Van Kouwen, L. & Kruit, P., 2018, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 36, 6, 06J901.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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2 Citations (Scopus)
54 Downloads (Pure)
Open Access
File
11 Citations (Scopus)
26 Downloads (Pure)

Design for an aberration corrected scanning electron microscope using miniature electron mirrors

Dohi, H. & Kruit, P., 1 Jun 2018, In : Ultramicroscopy. 189, p. 1-23 23 p.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Efficient two-port electron beam splitter via a quantum interaction-free measurement

Yang, Y., Kim, C. S., Hobbs, R. G., Kruit, P. & Berggren, K. K., 2018, In : Physical Review A. 98, 4, 043621.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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3 Citations (Scopus)
8 Downloads (Pure)

Grating mirror for diffraction of electrons

Krielaart, M. A. R. & Kruit, P., 2018, In : Physical Review A. 98, 6, 9 p., 063806.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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3 Citations (Scopus)
18 Downloads (Pure)

Method for inspecting a specimen and charged particle multi-beam device

Kruit, P. & Frosien, J., 2018, IPC No. H01J, Patent No. US 9,922,796, Priority date 1 Dec 2016

Research output: Patent

Method for inspecting a specimen and charged particle multi-beam device

Kruit, P. & Frosien, J., 2018, IPC No. H01J, Priority date 1 Dec 2016, Priority No. WO 2018/099756

Research output: Patent

1 Downloads (Pure)
2017

Apparatus and method for irradiating a surface of a sample using charged particle beams

Kruit, P., Scotuzzi, M. & Hagen, C. W., 2017, IPC No. H01J, Priority date 30 May 2016, Priority No. NL 2016853

Research output: Patent

Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers

Haring, M., Liv Hamarat, N., Zonnevylle, C., Narvaez Gonzalez, A., Voortman, L., Kruit, P. & Hoogenboom, J., 2 Mar 2017, In : Scientific Reports. 7, 43621.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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11 Citations (Scopus)
30 Downloads (Pure)

De Philips EM300 Elektronenmicroscoop

Kruit, P., 2017, 175 jaar TU Delft : Erfgoed in 33 verhalen. van Woerkom, P. T. L. M., Ankersmit, W., Hagman, R., Heijmans, H. G., Olsder, G. J. & van Schootbrugge, G. (eds.). Histechnica, p. 141-145

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterProfessional

Open Access
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37 Downloads (Pure)
2016

A high-current scanning electron microscope with multi-beam optics

Doi, T., Yamazaki, M., Ichimura, T., Ren, Y. & Kruit, P., 2016, In : Microelectronic Engineering. 159, p. 132-138 7 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Coulomb interactions in sharp tip pulsed photo field emitters

Cook, B. & Kruit, P., 10 Oct 2016, In : Applied Physics Letters. 109, 15, 151901.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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7 Citations (Scopus)
40 Downloads (Pure)

Designs for a quantum electron microscope

Kruit, P., Hobbs, R. G., Kim, C. S., Yang, Y., Manfrinato, V. R., Hammer, J., Thomas, S., Weber, P., Klopfer, B., Kohstall, C., Juffmann, T., Kasevich, M. A., Hommelhoff, P. & Berggren, K. K., 1 May 2016, In : Ultramicroscopy. 164, p. 31-45 15 p.

Research output: Contribution to journalArticleScientificpeer-review

32 Citations (Scopus)

Electron Sources

Kruit, P., 2016, Transmission Electron Microscopy: Diffraction, Imaging, and Spectrometry. Carter, C. B. & Williams, D. B. (eds.). Springer, p. 1-15 16 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

MBSEM image acquisition and image processing in LabView FPGA

Rahangdale, S., Keijzer, P. & Kruit, P., 2016, IWSSIP 2016 - Proceedings of the 23rd International Conference on Systems, Signals and Image Processing. Rybarova, R., Rozinaj, G., I., M. & P., T. (eds.). IEEE, Vol. 2016-June. 4 p. 7502728

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

Multi-Beam Scanning Electron Microscope Design

Kruit, P. & Ren, Y., 2016, In : Microscopy and Microanalysis. 22, S3, p. 574-575 2 p.

Research output: Contribution to journalArticleScientificpeer-review

Multi electron beam inspection apparatus

Kruit, P., 2016, IPC No. H01J, Priority date 4 Sep 2014, Priority No. WO2016/036246

Research output: Patent

Sensitivity of secondary electron yields and SEM images to scattering parameters in MC simulations

Verduin, T., Lokhorst, S. R., Hagen, C. W. & Kruit, P., 2016, In : Microelectronic Engineering. 155, p. 114-117

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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1 Citation (Scopus)
20 Downloads (Pure)

Simulation of shotnoise induced side-wall roughness in electron lithography

Verduin, T., Lokhorst, S. R., Hagen, C. W. & Kruit, P., 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Sanchez, M. I. & Ukraintsev, V. A. (eds.). SPIE, Vol. 9778. 97781Z. (Proceedings of SPIE; vol. 9778).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
File
1 Citation (Scopus)
14 Downloads (Pure)
Open Access
File
13 Citations (Scopus)
153 Downloads (Pure)

Transmission electron imaging in the Delft multibeam scanning electron microscope 1

Ren, Y. & Kruit, P., 27 Oct 2016, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 34, 6, 06KF02.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
5 Citations (Scopus)
90 Downloads (Pure)
2015

Arrangement and method for transporting radicals

Kruit, P., 2015, IPC No. B08B; H05H; H01L; B82Y; G03F; H01J; F15D, Patent No. US 9123507 B2, Priority date 20 Mar 2012

Research output: Patent

Electron Microscopy of Living Cells During in Situ Fluorescence Microscopy

Liv, N., van Oosten Slingeland, DSB., Baudoin, JP., Kruit, P., Piston, DW. & Hoogenboom, J., 2015, In : ACS Nano (online). p. 1-13 13 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
19 Citations (Scopus)

Lithography system and projection method

Kruit, P., Jager, R., Steenbrink, S. W. H. K. & Wieland, MJJ., 2015, IPC No. Aanvrager: Mapper Lithography B.V., Patent No. USRE45552, Priority date 9 Jun 2015

Research output: Patent

Method for determining local concentration of markers in a sample

Kruit, P. & Hoogenboom, JP., 2015, IPC No. OCT-12-042Applicant: DELMIC B.V;, Patent No. NL 2012218 C, Priority date 10 Aug 2015

Research output: Patent

Parallel transmission electron detector for multi-beam scanning electron microscope

Zonnevylle, AC., Kruit, P. & Ren, Y., 2015, IPC No. OCT-14-003, Patent No. WO 2015/170969, Priority date 12 Nov 2015

Research output: Patent

The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images

Verduin, T., Lokhorst, SR., Kruit, P. & Hagen, CW., 2015, Metrology, Inspection, and Process Control for Microlithography XXIX. Cain, JP. & Sanchez, MI. (eds.). Bellingham, WA, USA: SPIE, p. 1-18 18 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 9424).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
4 Citations (Scopus)