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Research Output

100 Volumes of Ultramicroscopy

Kruit, P., 2004, In : Ultramicroscopy. 1-2, p. xi-xiv

Research output: Contribution to journalArticleScientificpeer-review

10 nm lines and spaces written in HSQ using electron beam lithography

Grigorescu, AE., van der Krogt, MC., Hagen, CW. & Kruit, P., 2007, In : Microelectronic Engineering. 84, p. 822-824 3 p.

Research output: Contribution to journalArticleScientificpeer-review

75 Citations (Scopus)

3D Electronic microscopy with standing electron wave illumination

Buist, AH., Kruit, P. & Mertens, BM., 1996, Proceedings of the joint BVM/NVVM meeting. Koerten, HK. (ed.). p. 48-50 3 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Aberations of the electron optical systemof MAPPER

van Veen, AHV. & Kruit, P., 2001, s.l.: s.n. 26 p.

Research output: Book/ReportReportProfessional

Aberration correcting device for an electron microscope and an electron microscope comprising such a device

Kruit, P., 2018, IPC No. H01J, Priority date 22 Jul 2016, Priority No. WO 2018016961 A1

Research output: Patent

Aberration model of a multi beam scanning microscope for electron beam-induced deposition

van Bruggen, MJ., van Someren, B. & Kruit, P., 2006, In : Scanning: the journal of scanning microscopies. 28, 1, p. 42-47 6 p.

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

A combined objective lens for electrons and ions

Jager, PWH., Kelder, MCW. & Kruit, P., 1996, In : Microelectronic Engineering. 30, p. 427-430 4 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

A crystal beam splitter for electron holography

van Dijk, RM., Mertens, BM. & Kruit, P., 1996, Proceedings of the joint BVM/NVVM meeting. Koerten, HK. (ed.). p. 57-58 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Addition of different contributions to the charged particle probe size

Barth, JE. & Kruit, P., 1996, In : Optik. 101, 3, p. 101-109 9 p.

Research output: Contribution to journalArticleScientificpeer-review

139 Citations (Scopus)

Adjustment in a Mapper System

Kruit, P., 2006, IPC No. Aanvrager: Mapper Lithography B.V., Patent No. US 7,019,312, Priority date 28 Mar 2006

Research output: Patent

Adjustment in a MAPPER system

Kruit, P., 2002, IPC No. aangevraagd door Mapper Lithography B.V., Patent No. PCTP 164137, Priority date 20 Jun 2002

Research output: Patent

Advances in TEM instrumentation.

Kruit, P., 2000, Proceedings 12 th European congress on electron microscopy. p. 427-430 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Afsluitbare aperture houder voor transmissie electronen microscopen.

van Harrewijn, P., van der Heijden, HTC. & Kruit, P., 2000, Delft: Delft University of Technology. 24 p.

Research output: Book/ReportReportProfessional

4 Citations (Scopus)

A high-current scanning electron microscope with multi-beam optics

Doi, T., Yamazaki, M., Ichimura, T., Ren, Y. & Kruit, P., 2016, In : Microelectronic Engineering. 159, p. 132-138 7 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

A large current scanning electron microscope with MEMS-based multi-beam optics

Ichimura, T., Ren, Y. & Kruit, P., 2013, In : Microelectronic Engineering. 113, p. 109-113 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
8 Citations (Scopus)

A large current scanning electron microscope with MEMS-based multi-beam optics

Ichimura, T., Ren, Y. & Kruit, P., 2014, In : Microelectronic Engineering. 113, p. 109-113 5 p.

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

A large current scanning electron microscope with MEMS-based mutli-beam optics

Ichimura, T., Ren, Y. & Kruit, P., 2012, Proc. 38th International Conference on Micro & Nano Engineering. s.n. (ed.). s.n.: s.n., p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

26 Citations (Scopus)

Analysis and Improvement of the SCALPEL Source, Initial Project Plan TNDO 98-55

Moonen, D., Nijkerk, MD. & Kruit, P., 1998, Delft: Technische Universiteit Delft. 5 p.

Research output: Book/ReportReportProfessional

Analytical Electron Microscopy by scanning in Fourier space

Mertens, BM. & Kruit, P., 1996, Proceedings of the joint BVM/NVVM meeting. Koerten, HK. (ed.). p. 148-150 3 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

An experimental setup to proof the MAPPER electron lithography concept.

Kampherbeek, BJ., Wieland, MJJ. & Kruit, P., 1999, Abstractbook EIPBN'99.. p. 239-240 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

An experimental setup to prove the MAPPER electron lithography concept.

Kampherbeek, BJ., Wieland, MJJ. & Kruit, P., 1999, Abstractbook Micro-and-Nano-Engineering 99.. p. 19-20 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

An experimental setup to test the Mapper electron lithography concept.

Kampherbeek, BJ., Wieland, MJJ., Zuuk, A. & Kruit, P., 1999, Proceedings International Conference on Micro- & Nano-Engineering 1999.. Gentili, M. (ed.). p. 19-20 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

An experimental setup to test the MAPPER electron lithography concept.

Kampherbeek, BJ., Wieland, MJJ., Zuuk, A. & Kruit, P., 2000, In : Microelectronic Engineering. 53, 1-4, p. 279-282 4 p.

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

A noval vacuum electron source based on ballistic electron emission

Borgonjen, EG., van Bakel, GPEM., Hagen, CW. & Kruit, P., 1997, In : Applied Surface Science. 111, p. 165-169 5 p.

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)

A novel low-voltage ballistic-electron-emission-source

Hagen, CW., van Bakel, GPEM., Borgonjen, EG., Kruit, P., Kazmiruk, VV. & Kudryoshov, VA., 1996, Proceedings of the 9th International Vacuum Microelectronics Conference, IVMC 96. Gulayaev, Y. (ed.). St. Petersburg, Rusland: IVMC 96, p. 358-362 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

A Piezo-driven TEM-stage with subnanometer position stability

Mertens, BM., van der Wulp, H., van Beek, HF. & Kruit, P., 1996, Proceedings of the Joint Meeting BVM/NVVM. Koerten, HK. (ed.). p. 146-147 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Apparatus and method for inspecting a surface of a sample

Kruit, P., 2014, IPC No. OCT-12-048, Patent No. 2009696, Priority date 29 Apr 2014

Research output: Patent

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Kruit, P. & Naftali, R., 2019, IPC No. H01J, Patent No. US 10,395,887, Priority date 20 Feb 2018

Research output: Patent

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Kruit, P. & Naftali, R., 2019, IPC No. H01J, Priority date 20 Feb 2018, Priority No. WO 2019/164392

Research output: Patent

Apparatus and method for irradiating a surface of a sample using charged particle beams

Kruit, P., Scotuzzi, M. & Hagen, C. W., 2017, IPC No. H01J, Priority date 30 May 2016, Priority No. NL 2016853

Research output: Patent

Apparatus for generating a plurality of beamlets

Kruit, P., 2006, IPC No. aanvrager: Mapper Lithography IP B.V., Patent No. US 7,129,502, Priority date 31 Oct 2006

Research output: Patent

Apparatus for generating a plurality of beamlets

Kruit, P., 2009, IPC No. Aanvrager: Mapper Lithography IP B.V., Patent No. US 7,569,833 B2, Priority date 4 Aug 2009

Research output: Patent

Apparatus for generating a plurality of beamlets ¿ Aligned aperture lens

Kruit, P., 2008, IPC No. aangevraagd door Mapper Lithography IP B.V. Delft, Patent No. US 7,365,338, Priority date 29 Apr 2008

Research output: Patent

Apparatus for generating a plurality of beamlets ¿ Proportional deflections

Kruit, P., 2008, IPC No. aangevraagd door Mapper Lithography IP B.V. Delft, Patent No. US 7,391,037, Priority date 24 Jun 2008

Research output: Patent

Apparatus for generating a plurality of beamlets ¿ Spatial filter

Kruit, P., 2008, IPC No. aangevraagd door Mapper Lithography IP B.V. Delft, Patent No. US 7,348,567, Priority date 25 Mar 2008

Research output: Patent

Approaching the resolution limit of nanometer-scale electron beam-induced deposition

van Dorp, WF., van Someren, B., Hagen, CW., Kruit, P. & A. Crozier, P., 2005, In : Nano Letters: a journal dedicated to nanoscience and nanotechnology. 5, 7, p. 1303-1307 5 p.

Research output: Contribution to journalArticleScientificpeer-review

223 Citations (Scopus)

Arrangement and method for transporting radicals

Kruit, P., 2015, IPC No. B08B; H05H; H01L; B82Y; G03F; H01J; F15D, Patent No. US 9123507 B2, Priority date 20 Mar 2012

Research output: Patent

A simple fabrication method for tunnel junction emitters.

van Aken, RH., Janssen, MAPM., Hagen, CW. & Kruit, P., 2001, In : Solid-State Electronics. 45, p. 1033-1038 6 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Assessment of learning results in a problem-based physics course.

de Graaff, E. & Kruit, P., 1999, Proceedings SEFI Delft.. p. 47-52 6 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography

Hari, S., Verduin, T., Kruit, P. & Hagen, C. W., 2019, In : Micro and Nano Engineering. 4, p. 1-6

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
1 Citation (Scopus)
71 Downloads (Pure)

A testing set-up for a micro-analysis positron beam facility

Jorgensen, LV., van Veen, A., Schut, H., Winkelman, AJM. & Kruit, P., 1999, In : Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment. 427, p. 131-135 5 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

A testing set-up for a micro-analysis positron beam facility.

Jorgensen, LV., van Veen, AHV., Schut, H., Winkelman, AJM. & Kruit, P., 1999, In : Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment. 427, p. 131-135 5 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Augerspectroscopie met Hoge Plaatsresolutie in een Elekronenmicroscoop

Hoevers, HFC., Faber, JS. & Kruit, P., 1997, In : Nederlands Tijdschrift voor Natuurkunde. 63, 10, p. 257-259 3 p.

Research output: Contribution to journalArticleProfessional

Auger spectroscopy in SNOR-SEM, system concept

Kruit, P. & Lencova, B., 1997, Delft: Technische Universiteit Delft. 15 p.

Research output: Book/ReportReportProfessional

Auger Spectroscopy in the TEM/STEM

Hoevers, HFC., Faber, JS. & Kruit, P., 1996, Proceedings of the 11th European Congress on Microscopy. Steer, M. (ed.). Dublin, Ireland: U.C.D. Belfield, Dublin4, p. -

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers

Haring, M., Liv Hamarat, N., Zonnevylle, C., Narvaez Gonzalez, A., Voortman, L., Kruit, P. & Hoogenboom, J., 2 Mar 2017, In : Scientific Reports. 7, 43621.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
11 Citations (Scopus)
31 Downloads (Pure)

Ballistic electron source for electron microscope

Kruit, P., 1996, IPC No. Octrooischrift gepubliceerd onder nummer WO 96/10836-A1, 11-04-1996, Patent No. 5.587.586, Priority date 24 Dec 1996

Research output: Patent

Beam displacement and blur caused by fast electron beam deflection

Zhang, L., Garming, M. W. H., Hoogenboom, J. P. & Kruit, P., 2020, In : Ultramicroscopy. 211, 7 p., 112925.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
5 Downloads (Pure)

Brightness and energy spread measurements for an I-cathode

van Kouwen, L., van der Heijden, M. & Kruit, P., 2012, 2012 IEEE 9th International Vacuum Electron Sources Conference, IVESC 2012 , art. no. 6264197 , pp. 463-464. s.n. (ed.). s.n.: IEEE Society, p. 463-464 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review