P. Kruit

Search results

• 2018

  Method and apparatus for determining a density of fluorescent markers in a sample

  Kruit, P., 2018, IPC No. H01J, G01N, Patent No. US 10132753 B2

  Research output: Patent

• Method for inspecting a specimen and charged particle multi-beam device

  Kruit, P. & Frosien, J., 2018, IPC No. H01J, Patent No. US 9,922,796, Priority date 1 Dec 2016

  Research output: Patent

• Method for inspecting a specimen and charged particle multi-beam device

  Kruit, P. & Frosien, J., 2018, IPC No. H01J, Priority date 1 Dec 2016, Priority No. WO 2018/099756

  Research output: Patent

• Multi Electrode Lens Optimization Using Genetic Algorithms

  Hesam Mahmoudi Nezhad, N., Ghaffarian Niasar, M., Mohammadi-Gheidari, A., Janssen, T., Hagen, K. & Kruit, P., 2018, p. 5-5. 1 p.

  Research output: Contribution to conference › Abstract › Scientific

  • lenses 100%
  • optimization 100%
  • genetic algorithms 100%
  • electrodes 100%
  • Optimization 100%

• Optimization of electrostatic lens systems using genetic algorithms

  Hesam Mahmoudi Nezhad, N., Ghaffarian Niasar, M., Mohammadi-Gheidari, A., Janssen, T., Hagen, K. & Kruit, P., 2018, p. 24-25. 2 p.

  Research output: Contribution to conference › Abstract › Scientific

  • Optimization 100%
  • Genetic Algorithm 100%
  • Lens System 100%
  • Electrostatics 100%
  • optimization 100%
  1 Downloads (Pure)
• 2017

  Apparatus and method for irradiating a surface of a sample using charged particle beams

  Kruit, P., Scotuzzi, M. & Hagen, C. W., 2017, IPC No. H01J, Priority date 30 May 2016, Priority No. NL 2016853

  Research output: Patent

• Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers

  Haring, M., Liv Hamarat, N., Zonnevylle, C., Narvaez Gonzalez, A., Voortman, L., Kruit, P. & Hoogenboom, J., 2 Mar 2017, In: Scientific Reports. 7, 43621.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File

  • images 100%
  • cathodoluminescence 100%
  • electron microscopy 100%
  • fluorescence 100%
  • Image Overlay 100%
  15 Citations (Scopus)

  78 Downloads (Pure)

• De Philips EM300 Elektronenmicroscoop

  Kruit, P., 2017, 175 jaar TU Delft : Erfgoed in 33 verhalen. van Woerkom, P. T. L. M., Ankersmit, W., Hagman, R., Heijmans, H. G., Olsder, G. J. & van Schootbrugge, G. (eds.). Histechnica, p. 141-145

  Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Professional

  Open Access

  File
  201 Downloads (Pure)
• 2016

  A high-current scanning electron microscope with multi-beam optics

  Doi, T., Yamazaki, M., Ichimura, T., Ren, Y. & Kruit, P., 2016, In: Microelectronic Engineering. 159, p. 132-138 7 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  • lenses 100%
  • beam optics 100%
  • scanning electron microscopy 100%
  • beams 100%
  • Arrays 100%
  3 Citations (Scopus)

• Coulomb interactions in sharp tip pulsed photo field emitters

  Cook, B. & Kruit, P., 10 Oct 2016, In: Applied Physics Letters. 109, 15, 151901.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File

  • electrons 100%
  • energy 100%
  • applications 100%
  • interactions 100%
  • pulses 100%
  12 Citations (Scopus)

  87 Downloads (Pure)

• Designs for a quantum electron microscope

  Kruit, P., Hobbs, R. G., Kim, C. S., Yang, Y., Manfrinato, V. R., Hammer, J., Thomas, S., Weber, P., Klopfer, B., Kohstall, C., Juffmann, T., Kasevich, M. A., Hommelhoff, P. & Berggren, K. K., 1 May 2016, In: Ultramicroscopy. 164, p. 31-45 15 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  • design 100%
  • electron microscopes 100%
  • Electron Microscope 100%
  • interactions 80%
  • Electron 80%
  83 Citations (Scopus)

• Electron Sources

  Kruit, P., 2016, Transmission Electron Microscopy: Diffraction, Imaging, and Spectrometry. Carter, C. B. & Williams, D. B. (eds.). Springer, p. 1-15 16 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

  • microscopes 100%
  • electron sources 100%
  • Electron Source 100%
  • Electron 100%
  • resolution 66%

• MBSEM image acquisition and image processing in LabView FPGA

  Rahangdale, S., Keijzer, P. & Kruit, P., 2016, IWSSIP 2016 - Proceedings of the 23rd International Conference on Systems, Signals and Image Processing. Rybarova, R., Rozinaj, G., I., M. & P., T. (eds.). IEEE, Vol. 2016-June. 4 p. 7502728

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  • scanning electron microscopy 100%
  • images 100%
  • image processing 100%
  • beams 100%
  • LabVIEW 100%
  4 Citations (Scopus)

• Multi-Beam Scanning Electron Microscope Design

  Kruit, P. & Ren, Y., 2016, In: Microscopy and Microanalysis. 22, S3, p. 574-575 2 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Multi electron beam inspection apparatus

  Kruit, P., 2016, IPC No. H01J, Priority date 4 Sept 2014, Priority No. WO2016/036246

  Research output: Patent

• Sensitivity of secondary electron yields and SEM images to scattering parameters in MC simulations

  Verduin, T., Lokhorst, S. R., Hagen, C. W. & Kruit, P., 2016, In: Microelectronic Engineering. 155, p. 114-117

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File

  • electrons 100%
  • sensitivity 100%
  • simulation 100%
  • scattering 100%
  • images 100%
  4 Citations (Scopus)

  69 Downloads (Pure)

• Simulation of shotnoise induced side-wall roughness in electron lithography

  Verduin, T., Lokhorst, S. R., Hagen, C. W. & Kruit, P., 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Sanchez, M. I. & Ukraintsev, V. A. (eds.). SPIE, Vol. 9778. 97781Z. (Proceedings of SPIE; vol. 9778).

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access

  File

  • Roughness 100%
  • Substrates 100%
  • Electron 100%
  • Lithography 100%
  • Side 100%
  1 Citation (Scopus)

  54 Downloads (Pure)

• Time-resolved cathodoluminescence microscopy with sub-nanosecond beam blanking for direct evaluation of the local density of states

  Moerland, R., Weppelman, G., Garming, M., Kruit, P. & Hoogenboom, J., 2016, In: Optics Express. 24, 21, p. 24760-24772 13 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File

  • electrons 100%
  • evaluation 100%
  • density of states 100%
  • cathodoluminescence 100%
  • microscopy 100%
  32 Citations (Scopus)

  217 Downloads (Pure)

• Transmission electron imaging in the Delft multibeam scanning electron microscope 1

  Ren, Y. & Kruit, P., 27 Oct 2016, In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 34, 6, 06KF02.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File

  • electrons 100%
  • scanning electron microscopy 100%
  • transmission 100%
  • Scanning Electron Microscope 100%
  • Transmissions 100%
  13 Citations (Scopus)

  289 Downloads (Pure)
• 2015

  Arrangement and method for transporting radicals

  Kruit, P., 2015, IPC No. B08B; H05H; H01L; B82Y; G03F; H01J; F15D, Patent No. US 9123507 B2, Priority date 20 Mar 2012

  Research output: Patent

• Electron Microscopy of Living Cells During in Situ Fluorescence Microscopy

  Liv, N., van Oosten Slingeland, DSB., Baudoin, JP., Kruit, P., Piston, DW. & Hoogenboom, J., 2015, In: ACS Nano (online). p. 1-13 13 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  26 Citations (Scopus)

• Lithography system and projection method

  Kruit, P., Jager, R., Steenbrink, S. W. H. K. & Wieland, MJJ., 2015, IPC No. Aanvrager: Mapper Lithography B.V., Patent No. USRE45552, Priority date 9 Jun 2015

  Research output: Patent

• Method and apparatus for determining a density of fluorescent markers in a sample

  Kruit, P., 2015, IPC No. H01J, G01N, Priority No. NL 2012218 C2

  Research output: Patent

• Method for determining local concentration of markers in a sample

  Kruit, P. & Hoogenboom, JP., 2015, IPC No. OCT-12-042Applicant: DELMIC B.V;, Patent No. NL 2012218 C, Priority date 10 Aug 2015

  Research output: Patent

• Parallel transmission electron detector for multi-beam scanning electron microscope

  Zonnevylle, AC., Kruit, P. & Ren, Y., 2015, IPC No. OCT-14-003, Patent No. WO 2015/170969, Priority date 12 Nov 2015

  Research output: Patent

• The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images

  Verduin, T., Lokhorst, SR., Kruit, P. & Hagen, CW., 2015, Metrology, Inspection, and Process Control for Microlithography XXIX. Cain, JP. & Sanchez, MI. (eds.). Bellingham, WA, USA: SPIE, p. 1-18 18 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 9424).

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  7 Citations (Scopus)
• 2014

  A large current scanning electron microscope with MEMS-based multi-beam optics

  Ichimura, T., Ren, Y. & Kruit, P., 2014, In: Microelectronic Engineering. 113, p. 109-113 5 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Apparatus and method for inspecting a surface of a sample

  Kruit, P., 2014, IPC No. OCT-12-048, Patent No. 2009696, Priority date 29 Apr 2014

  Research output: Patent

• Confocal cathodoluminescence microscope

  Kruit, P., Hoogenboom, JP. & Zonnevylle, AC., 2014, IPC No. OCT-10-006Applicant: JB Hoogenboom, AC Zonnevylle, Delmic B.V, Patent No. US 8895921 B2, Priority date 25 Nov 2014

  Research output: Patent

• Confocal filtering in cathodoluminescence microscopy of nanostructures

  Narvaez Gonzalez, AC., Weppelman, IGC., Moerland, RJ., Hoogenboom, JP. & Kruit, P., 2014, In: Applied Physics Letters. 104, 251121 (2014), p. 1-5 5 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  11 Citations (Scopus)

• Determination of line edge roughness in low-dose top-down scanning electron microscopy images

  Verduin, T., Kruit, P. & Hagen, CW., 2014, In: Proceedings of SPIE- International Society for Optical Engineering. 9050, p. 1-3 3 p.

  Research output: Contribution to journal › Conference article › Scientific › peer-review

• Determination of line edge roughness in low-dose top-down scanning electron microscopy images

  Verduin, T., Kruit, P. & Hagen, CW., 2014, In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 13, 3, p. 1-10 10 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Method for positioning a focal plane of a light imaging device and apparatus arranged for applying said method

  Kruit, P., Hoogenboom, J. P., Liv Hamarat, N. & Narvaez Gonzalez, A. C., 2014, IPC No. G02B, H01J, Priority date 26 Nov 2015, Priority No. WO 2015178774 A1

  Research output: Patent

• Multi-electron-beam deflector array

  Zonnevylle, AC., Heerkens, CTH., Hagen, CW. & Kruit, P., 2014, In: Microelectronic Engineering. 123, p. 140-148 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  3 Citations (Scopus)

• Multi-electron-beam nanoelectronics

  Kruit, P., 2014, Technical Digest - 2014 27th International Vacuum Nanoelectronics Conference, IVNC 2014. nb (ed.). nb: IEEE, p. 220-221 2 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Passieve compensatie van magne

  Kruit, P., Overbeeke, F. & Gravendeel, B., 2014, IPC No. OCT-07-014, Patent No. 2017118, Priority date 14 May 2014

  Research output: Patent

• Scanning electron microscopy of individual nanoparticle bio-markers in liquid

  Liv Hamarat, N., Lazic, I., Kruit, P. & Hoogenboom, JP., 2014, In: Ultramicroscopy. 143, p. 93-99 7 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  11 Citations (Scopus)

• Semitransparency in interaction-free measurements

  Thomas, S., Kohstall, C., Kruit, P. & Hommelhoff, P., 2014, In: Physical Review A (Atomic, Molecular and Optical Physics). 90, 5, p. 0538401-05384010 10 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  23 Citations (Scopus)

• Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing

  Hari, S., Hagen, CW., Verduin, T. & Kruit, P., 2014, In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 13, 3, p. 1-7 7 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing

  Hari, S., Hagen, CW., Verduin, T. & Kruit, P., 2014, Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90490M. Resnick, D. J. & Bencher, C. (eds.). s.n.: SPIE, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2013

  A large current scanning electron microscope with MEMS-based multi-beam optics

  Ichimura, T., Ren, Y. & Kruit, P., 2013, In: Microelectronic Engineering. 113, p. 109-113 5 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  10 Citations (Scopus)

• Cathodoluminescence Microscopy of nanostructures on glass substrates

  Narvaez, AC., Weppelman, IGC., Moerland, RJ., Liv, N., Zonnevylle, AC., Kruit, P. & Hoogenboom, JP., 2013, In: Optics Express. 21, 24, p. 29968-29978 11 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  16 Citations (Scopus)

• Charged particle lithography system with aperture array cooling

  Kruit, P. & van Veen, A. H., 2013, IPC No. H01L, H04Q, G02B, B82Y, B32B, B29C, G03F, H01J, G03B, B01J, G21K, G06F, G01B, Patent No. US 8558196 B2, Priority date 26 Oct 2010

  Research output: Patent

• Deflection properties of an electrostatic electron lens with a shifted electrode

  Zonnevylle, AC., Verduin, T., Hagen, CW. & Kruit, P., 2013, In: Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures. 31, 6, p. 1-8 8 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  3 Citations (Scopus)

• Energy Spread Measurement of an Electron Impact Gas Ion Source Equipped with a Miniaturized Gas Chamber

  Jun, DS. & Kruit, P., 2013, p. 1-2. 2 p.

  Research output: Contribution to conference › Abstract › Scientific

• Integration of a high-NA light microscope in a scanning electron microscope

  Zonnevylle, AC., van Tol, RFC., Liv, N., Narvaez, AC., Effting, APJ., Kruit, P. & Hoogenboom, JP., 2013, In: Journal of Microscopy. 252, 1, p. 58-70 13 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  55 Citations (Scopus)

• Lithography system, method of clamping an wafer table

  Kruit, P., de Boer, G. & Dansberg, MP., 2013, IPC No. Applicant: G de Boer, Mapper Lithography IP BV, MP Dansberg, P Kruit, Patent No. CN 101884016 B, Priority date 9 Oct 2013

  Research output: Patent

• Scanning electron microscopy of individual nanoparticle bio-markers in liquid

  Liv, N., Lazic, I., Kruit, P. & Hoogenboom, JP., 2013, In: Ultramicroscopy. p. 1-7 7 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  12 Citations (Scopus)

• Simultaneous Correlative Scanning Electron and High-NA Fluorescence Microscopy

  Liv, N., Zonnevylle, AC., Narvaez Gonzalez, AC., Effting, APJ., Voorneveld, PW., Lucas, MS., Hardwick, JC., Wepf, RA., Kruit, P. & Hoogenboom, JP., 2013, In: PLoS ONE. 8, 2, p. 1-10 10 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  72 Citations (Scopus)

• Two microscopes integrated in one : simultaneous correlative light and electron microscopy

  Hoogenboom, JP., Zonnevylle, AC., Liv, N. & Kruit, P., 2013, In: Imaging & Microscopy. 15, 2, p. 30-32 3 p.

  Research output: Contribution to journal › Article › Professional