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Research Output

1998

Finge Field Monochromator for high brightness electron sources

Mook, HW. & Kruit, P., 1998, Proceedings of the 14th International Congress on Electron Microscopy. p. 73-74 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

High Resoluton off-axis holography with a crystal beam splitter

Mertens, BM., Overwijk, MHF. & Kruit, P., 1998, Proceedings of the 14th International Congress on Electron Microscopy. p. 531-532 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

High throughput electron lithography with the MAPPER concept

Kruit, P., 1998, In : Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures. 16, 6, p. 3177-3180 4 p.

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)

Influence of Coulomb Interactions on current density distribution in a two-lens focused ion beam system

Bi, J., Jager, PWH., Barth, JE. & Kruit, P., 1998, In : Microelectronic Engineering. 41/42, p. 249-252 4 p.

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)

Lithography system: Mapper concept, a hybrid deep-UV and electron projection lithography system for the 0.1 nano-m generation and beyond

Kruit, P., 1998, IPC No. Nederlandse organisatie voor toegepast natuurwetenschappelijk onderzoek TNO, Patent No. EUR972015952, Priority date 26 May 1997

Research output: Patent

Microfabrication of ultra-thin freestanding platinum foils

Aristov, VV., Kazmiruk, VV., Kudryashov, VA., Levashov, VI., Red'kin, SI., Hagen, CW. & Kruit, P., 1998, In : Surface Science. 402-404, p. 337-340 4 p.

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)

Ontwikkeling Rotating Anode Tube fase 2 TN-DO 98-58

Koets, E. & Kruit, P., 1998, Delft: Technische Universiteit Delft. 17 p.

Research output: Book/ReportReportProfessional

Optimum operation of the High Resolution EELS monochromator TNDO 98-14

Mook, HW. & Kruit, P., 1998, Delft: Technische Universiteit Delft. 32 p.

Research output: Book/ReportReportProfessional

Spot Movement due to signal transients in multiple deflector blankers in electron beam lithography machines

Mulder, EH. & Kruit, P., 1998, In : Microelectronic Engineering. 41/42, p. 159-162 4 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

The influence of statistical coulomb interactions on the shape and depth of the langmuir minimum

Nijkerk, MD. & Kruit, P., 1998, International Vacuum Electron Sources Conference (IVESC). p. 169-170 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Through-the-lens Auger-SEM with the parallelizer principle TNDO 98-53

Lencova, B. & Kruit, P., 1998, Delft: Technische Universiteit Delft. 57 p.

Research output: Book/ReportReportProfessional

1997

A noval vacuum electron source based on ballistic electron emission

Borgonjen, EG., van Bakel, GPEM., Hagen, CW. & Kruit, P., 1997, In : Applied Surface Science. 111, p. 165-169 5 p.

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)

Augerspectroscopie met Hoge Plaatsresolutie in een Elekronenmicroscoop

Hoevers, HFC., Faber, JS. & Kruit, P., 1997, In : Nederlands Tijdschrift voor Natuurkunde. 63, 10, p. 257-259 3 p.

Research output: Contribution to journalArticleProfessional

Auger spectroscopy in SNOR-SEM, system concept

Kruit, P. & Lencova, B., 1997, Delft: Technische Universiteit Delft. 15 p.

Research output: Book/ReportReportProfessional

Coincidence Microscopy

Kruit, P., 1997, Handbook of Microscopy, Applications in Materials Science, Solid-State Physics and Chemistry. Amelinckx, S., van Dyck, D., van Landuyt, J. & van Tendeloo, G. (eds.). Weinheim (Federal Republic of Germany): VCH Verlaggesellschaft mbH, p. 955-962 8 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

Design of a lens system to obtain standing electron wave illumination

Mertens, BM. & Kruit, P., 1997, Electron Microscopy and Analysis 1997 IOP series. Rodenburg, JM. (ed.). p. 77-80 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Design of a magnification and Rotation Unit with Pre-design Tool POCAD

Kruit, P., Mertens, BM. & van der Stam, MAJ., 1997, Proceedings of SPIE Charged Particle Optics III. Munro, E. (ed.). p. 22-36 15 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Electrostatic in-line monochromator for field emission guns

Mook, HW. & Kruit, P., 1997, Electron MIcroscopy and Analysis 1997 IOP series. Rodenburg, JM. (ed.). p. 81-84 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Extrapolation of the Coulomb interaction blur reduction due to spherical aberration to the axis

Kruit, P. & Barth, JE., 1997, Delft: Technische Universiteit Delft. 5 p.

Research output: Book/ReportReportProfessional

Feasibility study for a high brightness X-ray source of 1 micro-meter focal spot diameter

Mulder, EH., Barth, JE., Hagen, CW. & Kruit, P., 1997, Delft: Techische Universiteit Delft. 60 p.

Research output: Book/ReportReportProfessional

New Directions in very high resolution analytical electron microscopy

Kruit, P., 1997, Electron Microscopy and Analysis 1997 IOP series. Rodenburg, JM. (ed.). p. 269-272 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Ontwikkeling Rotating Anode Tube fase 2

Koets, E. & Kruit, P., 1997, Delft: Technische Universiteit Delft. 17 p.

Research output: Book/ReportReportProfessional

Space charge and statistical coulomb effects

Kruit, P. & Jansen, GH., 1997, Handbook of Charged Particle Optics. Orloff, J. (ed.). New York: CRC Press, p. 275-318 44 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

Stochastic coulomb interactions in ion projection lithography systems with aberration-broadened crossover

Kruit, P., Barth, JE., Lammer, G., Chalupka, A., Vonach, H., Löschner, H. & Stengl, G., 1997, In : Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures. 15, 6, p. 2369-2372 4 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Theoretical and experimental investigations on Coulomb interactions in a Two-lens focussed ion beam instrument

Bi, J., Jiang, XR. & Kruit, P., 1997, In : Microelectronic Engineering. 35, 1-4, p. 439-442 4 p.

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)
1996

3D Electronic microscopy with standing electron wave illumination

Buist, AH., Kruit, P. & Mertens, BM., 1996, Proceedings of the joint BVM/NVVM meeting. Koerten, HK. (ed.). p. 48-50 3 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

A combined objective lens for electrons and ions

Jager, PWH., Kelder, MCW. & Kruit, P., 1996, In : Microelectronic Engineering. 30, p. 427-430 4 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

A crystal beam splitter for electron holography

van Dijk, RM., Mertens, BM. & Kruit, P., 1996, Proceedings of the joint BVM/NVVM meeting. Koerten, HK. (ed.). p. 57-58 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Addition of different contributions to the charged particle probe size

Barth, JE. & Kruit, P., 1996, In : Optik. 101, 3, p. 101-109 9 p.

Research output: Contribution to journalArticleScientificpeer-review

140 Citations (Scopus)

Analytical Electron Microscopy by scanning in Fourier space

Mertens, BM. & Kruit, P., 1996, Proceedings of the joint BVM/NVVM meeting. Koerten, HK. (ed.). p. 148-150 3 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

A novel low-voltage ballistic-electron-emission-source

Hagen, CW., van Bakel, GPEM., Borgonjen, EG., Kruit, P., Kazmiruk, VV. & Kudryoshov, VA., 1996, Proceedings of the 9th International Vacuum Microelectronics Conference, IVMC 96. Gulayaev, Y. (ed.). St. Petersburg, Rusland: IVMC 96, p. 358-362 5 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

A Piezo-driven TEM-stage with subnanometer position stability

Mertens, BM., van der Wulp, H., van Beek, HF. & Kruit, P., 1996, Proceedings of the Joint Meeting BVM/NVVM. Koerten, HK. (ed.). p. 146-147 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Auger Spectroscopy in the TEM/STEM

Hoevers, HFC., Faber, JS. & Kruit, P., 1996, Proceedings of the 11th European Congress on Microscopy. Steer, M. (ed.). Dublin, Ireland: U.C.D. Belfield, Dublin4, p. -

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Ballistic electron source for electron microscope

Kruit, P., 1996, IPC No. Octrooischrift gepubliceerd onder nummer WO 96/10836-A1, 11-04-1996, Patent No. 5.587.586, Priority date 24 Dec 1996

Research output: Patent

Characterization of ultrasharp field emitters by projection microscopy

Fransen, MJ., Damen, EPN., Schiller, C., van Rooy, TL., Groen, HB. & Kruit, P., 1996, In : Applied Surface Science. 94/95, p. 107-112 6 p.

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)
9 Citations (Scopus)

Comparison between different imaging modes in focussed ion beam instruments

Jiang, XR. & Kruit, P., 1996, In : Microelectronic Engineering. 30, p. 249-252 4 p.

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)

Coulomb interactions in the Philips XL-FEG

Barth, JE., Xiang, XR., Nijkerk, MD., Jansen, GH. & Kruit, P., 1996, Delft: Technische Universiteit Delft. 32 p.

Research output: Book/ReportReportProfessional

Differential phase contrast in TEM

McCartney, MR., Kruit, P., Buist, AH. & Scheinfein, MR., 1996, In : Ultramicroscopy. 65, p. 179-186 8 p.

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)

Electron Microscopy in the Netherlands

Kruit, P., Schapink, FW., Geus, JW., Verkleij, AJ. & Hulstaert, CE., 1996, In : Advances in Imaging and Electron Physics. 96, p. 287-299 13 p.

Research output: Contribution to journalArticleScientificpeer-review

Electron Standing Wave Illumination For Electron Microscopy, Review of the work performed and results

Kruit, P. & Mertens, BM., 1996, Delft: Technische Universiteit Delft. 15 p.

Research output: Book/ReportReportProfessional

High resolution STEM probe size dependence on probe current and beam brightness

Barth, JE. & Kruit, P., 1996, Proceedings of the 11th European Congress on Microscopy. Steer, M. (ed.). Dublin, Ireland: U.C.D. Belfield Dublin, Ireland, p. -

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Influence of aperture positon in focussed ion beam systems on statistical Coulomb interaction effects

Kruit, P. & Jiang, XR., 1996, Proceedings SPIE, The International Society for Optical Engineering. Munro, E. (ed.). p. 166-176 11 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Interactive design of multi component systems

van der Stam, MAJ., Barth, JE. & Kruit, P., 1996, Proceedings SPIE, The International Society for Precision Engineering. Munro, E. (ed.). p. 90-102 13 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Ontwikkeling Rataring Anode Tube fase 0+1

van der Stam, MAJ., Koets, E. & Kruit, P., 1996, Delft: Technische Universiteit Delft. 27 p.

Research output: Book/ReportReportProfessional

Optical design of a combined ion and electron beam system for nanotechnology

Jager, PWH. & Kruit, P., 1996, In : Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures. 14, 6, p. 3753-3758 6 p.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Standing wave illumination for superresolution analytical electron microscopy

Mertens, BM., Buist, AH. & Kruit, P., 1996, Proceedings of the 11th European Congress on Microscopy. Steer, M. (ed.). Dublin, Ireland: U.C.D. Belfield, Dublin4, p. -

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

The influence of ion beam parameters on pattern resolution

Jager, PWH., Hagen, CW. & Kruit, P., 1996, In : Microelectronic Engineering. 30, p. 353-356 4 p.

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)

Throughput in ion beam projection lithography

Barth, JE. & Kruit, P., 1996, Delft: Technische Universiteit Delft. 21 p.

Research output: Book/ReportReportProfessional