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2020

Local versus Global Optimization of Electron Lens System Design

Nezhad, N. H. M., Niasar, M. G., Hagen, C. W. & Kruit, P., 2020, 6th International Conference on Optimization and Applications, ICOA 2020 - Proceedings. Hachimi, H., Kaicer, M., Addaim, A. & Melliani, S. (eds.). Piscataway, NJ, USA: Institute of Electrical and Electronics Engineers (IEEE), 9094475

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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18 Downloads (Pure)
2019

Surface effects in simulations of scanning electron microscopy images

Van Kessel, L., Hagen, C. W. & Kruit, P., 2019, Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIII. Ukraintsev, V. A. & Adan, O. (eds.). SPIE, Vol. 10959. 16 p. 109590V

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
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53 Downloads (Pure)
2016

MBSEM image acquisition and image processing in LabView FPGA

Rahangdale, S., Keijzer, P. & Kruit, P., 2016, IWSSIP 2016 - Proceedings of the 23rd International Conference on Systems, Signals and Image Processing. Rybarova, R., Rozinaj, G., I., M. & P., T. (eds.). IEEE, Vol. 2016-June. 4 p. 7502728

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

Simulation of shotnoise induced side-wall roughness in electron lithography

Verduin, T., Lokhorst, S. R., Hagen, C. W. & Kruit, P., 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Sanchez, M. I. & Ukraintsev, V. A. (eds.). SPIE, Vol. 9778. 97781Z. (Proceedings of SPIE; vol. 9778).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
File
1 Citation (Scopus)
14 Downloads (Pure)
2015

The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images

Verduin, T., Lokhorst, SR., Kruit, P. & Hagen, CW., 2015, Metrology, Inspection, and Process Control for Microlithography XXIX. Cain, JP. & Sanchez, MI. (eds.). Bellingham, WA, USA: SPIE, p. 1-18 18 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 9424).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
4 Citations (Scopus)
2014

Multi-electron-beam nanoelectronics

Kruit, P., 2014, Technical Digest - 2014 27th International Vacuum Nanoelectronics Conference, IVNC 2014. nb (ed.). nb: IEEE Society, p. 220-221 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing

Hari, S., Hagen, CW., Verduin, T. & Kruit, P., 2014, Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90490M. Resnick, D. J. & Bencher, C. (eds.). s.n.: SPIE, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2012

A large current scanning electron microscope with MEMS-based mutli-beam optics

Ichimura, T., Ren, Y. & Kruit, P., 2012, Proc. 38th International Conference on Micro & Nano Engineering. s.n. (ed.). s.n.: s.n., p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

26 Citations (Scopus)

Brightness and energy spread measurements for an I-cathode

van Kouwen, L., van der Heijden, M. & Kruit, P., 2012, 2012 IEEE 9th International Vacuum Electron Sources Conference, IVESC 2012 , art. no. 6264197 , pp. 463-464. s.n. (ed.). s.n.: IEEE Society, p. 463-464 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2011

Design and Fabrication of a Miniaturized Gas Ionization Chamber for Production of High Quality Ion Beams

Jun, DS., Kutchoukov, VG. & Kruit, P., 2011, Proceedings of the 37th International Conference on Micro and Nano Engineering. nn (ed.). Berlin: nn, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2008

Design of a high brightness multi-electron beam source

Zhang, Y. & Kruit, P., 2008, Proceedings of the Seventh International Conference on Charged Particle Optics. Munro, E. & Rouse, J. (eds.). London, U.K.: Elsevier, p. 553-563 11 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

10 Citations (Scopus)
2005

Multibeam electron source for nanofrabrication and multibeam imaging

van Someren, B., van Bruggen, MJ. & Kruit, P., 2005, Proceedings of the NVvM 2005 meeting, Jaarboek 2005. p. 30-31 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Nanolithography in an environmental scanning transmission electron microscope

van Dorp, WF., Hagen, CW., A. Crozier, P., van Someren, B. & Kruit, P., 2005, Proceedings of the NVvM 2005 meeting, Jaarboek 2005. p. 98-99 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Resolution limits in electron-beam-induced deposition

Kruit, P., van Dorp, WF., van Someren, B., Silvis-Cividjian, N. & Hagen, CW., 2005, Proceedings Conference APF 10. Kido, G. (ed.). National Institute of Materials Science, p. 9-16 8 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

87 Citations (Scopus)
2004

Electron beam induced deposition and in-situ inspection of sub-10 nm structures

van Bruggen, MJ., van Dorp, WF., van Someren, B., Silvis-Cividjian, N., Hagen, CW. & Kruit, P., 2004, Proceedings of the 13th Eurepean Microscopy Congress. p. 175-176 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Electron microlenses and microlens arrays

van Bruggen, MJ., van Someren, B. & Kruit, P., 2004, Proceedings of the 9th International Seminar "Recent trends in charged particle optics and surface physics instrumentation". Brno: Institure of Scientific Instruments AS CR, p. 17-18 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

On the performance of an energy filter for a high brightness electron gun

Cubric, D., van Kranen, SR., Kruit, P. & Kumashiro, S., 2004, Proceedings of the 9th Intern. Seminar 'Recent trends in charged particle optics and surface physics instrumentation'. p. 19-20 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2002

Concept for a low energy foil corrector

van Aken, RH., Hagen, CW., Barth, JE. & Kruit, P., 2002, Physics and Materials; proceedings of 15th International Congress on Electron Microscopy, Durban, South Africa, 1-6 sept. 2002. p. 1101-1102 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Design of an Electron Projection System with Slider Lenses and Multiple Beams

Moonen, D., Leunissen, LHA., de Jager, PWH., Kruit, P., Bleeker, AJ. & van der Mast, KD., 2002, Proceedings SPIE. SPIE, p. 932-943 12 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

DIY in ICT: faculty members develop their own implementations of ICT in Education

van Daalen, C., Dopper, S. M., Dijkema, GPJ., de Haan, ARC., Herder, PM., Kruit, P. & Sjoer, E., 2002, The Renaissance Engineer of Tomorrow. C Borri & TU Weck (eds.). Firenze: Edizioni Polistampa, p. 1-8 8 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Scanning transmission electron microscopy at sub-eV energy

Rensen, M. J. M., van Aken, RH., Hagen, CW. & Kruit, P., 2002, Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. L. Frank (ed.). Brno: Czechoslovak Microscopy Society, p. S-5-S-6

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2001

Computer simulations for standing wave illumination.

de Jong, NW., Hagen, CW. & Kruit, P., 2001, Proceedings of the NVvM 2001 meeting.. p. 100-101 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Elemental analysis at the nanometer level by Auger microscopy.

van Bruggen, MJ., van Es, JJP., Kruit, P. & van Langeveld, AD., 2001, Proceedings of the NVvM 2001 meeting.. p. 88-89 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Field emission photocathode array for high throughput lithography.

van Veen, AHV., Kampherbeek, BJ., Wieland, MJJ. & Kruit, P., 2001, Proceedings of the 14th International Vacuum Microeelectronics Conference (IVMC).. p. 127-128 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1 Citation (Scopus)

New features in program package POCAD.

Leunissen, LHA., van der Stam, MAJ. & Kruit, P., 2001, Proceedings of SPIE.. p. 119-126 8 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Progress with the IBM very high resolution STEM.

Batson, PE., Mook, HW., Kruit, P., Krivanek, OL. & Dellby, N., 2001, Proceedings Microscopy and Microanalysis.. New York: Springer, p. -

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

2000

Advances in TEM instrumentation.

Kruit, P., 2000, Proceedings 12 th European congress on electron microscopy. p. 427-430 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Intrinsic high-brightness monochromatic electron sources for microscopy.

van Aken, RH., Kreyveld, M., van Druten, NJ., Hagen, CW. & Kruit, P., 2000, Jaarboek Nederlandse Vereniging voor Microscopie. p. 128-129 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Limits to the reduced brightness of the Zr/O/W Schottky emitter.

van Veen, AHV., Barth, JE., Hagen, CW. & Kruit, P., 2000, Jaarboek Nederlandse Vereniging voor Microscopie. p. 188-189 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Monochromator for high brightness electron guns.

Mook, HW., Batson, PE. & Kruit, P., 2000, Proceedings 12th European congress on electron microscopy. p. 315-316 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Resolution limits in Electron Beam Induced Deposition (EBID).

Silvis-Cividjian, N., Hagen, CW. & Kruit, P., 2000, Jaarboek Nederlandse Vereniging voor Microscopie. p. 184-185 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Retrofit of an Emispec data acquisition system for Auger spectroscopy and coincidence measurements in a TEM.

van Es, JJP., Nonhebel, J. & Kruit, P., 2000, Jaarboek Nederlandse Vereniging voor Microscopie. p. 148-149 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

SEM resolution improvement at low voltage with gun monochromator.

Barth, JE., Nijkerk, MD., Mook, HW. & Kruit, P., 2000, Proceedings 12 th European congress on electron microscopy. p. 437-438 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1999

An experimental setup to proof the MAPPER electron lithography concept.

Kampherbeek, BJ., Wieland, MJJ. & Kruit, P., 1999, Abstractbook EIPBN'99.. p. 239-240 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

An experimental setup to prove the MAPPER electron lithography concept.

Kampherbeek, BJ., Wieland, MJJ. & Kruit, P., 1999, Abstractbook Micro-and-Nano-Engineering 99.. p. 19-20 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

An experimental setup to test the Mapper electron lithography concept.

Kampherbeek, BJ., Wieland, MJJ., Zuuk, A. & Kruit, P., 1999, Proceedings International Conference on Micro- & Nano-Engineering 1999.. Gentili, M. (ed.). p. 19-20 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Assessment of learning results in a problem-based physics course.

de Graaff, E. & Kruit, P., 1999, Proceedings SEFI Delft.. p. 47-52 6 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Electron Spectroscopy in the STEM.

Kruit, P., 1999, Proceedings of International Eighth Beijing Conference and exhibition on instrumental analyses.. Beijing: Peking University Press, p. -

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Energy filtering of Schottky field emission gun using fringe field monochromator.

Mook, HW., van Veen, AHV. & Kruit, P., 1999, Proceedings Microscopy & Microanalysis 1999.. p. -

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Investigation of illumination non-uniformities from an electron gun for projection electron-beam lithography.

Moonen, D., Nijkerk, MD., Kruit, P. & Waskiewicz, WK., 1999, Abstractbook EIPBN'99.. p. 250-251 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Operation of the Fringe Field Monochromator in Field Emission STEM.

Mook, HW., Batson, PE. & Kruit, P., 1999, Proceedings Electron Microscopy and Analysis 1999.. Institute of Physics Conference Series., p. 223-226 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Results of a pilot experiment on direct phase determination of diffracted beams in TEM.

Mertens, BM. & Kruit, P., 1999, Proceedings Electron Microscopy and Analysis 1999.. Institute of Physics Conference Series., p. 133-136 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

The Fringe Field Monochromator in a Field Emission STEM.

Mook, HW., van Veen, AHV. & Kruit, P., 1999, Jaarboek 1999, Nederlandse Vereniging voor Microscopie.. p. 90-91 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Uniform illumination in SCALPEL by imaging the angular distribution.

Moonen, D., Nijkerk, MD., Kruit, P. & Waskiewicz, WK., 1999, Proceedings of SPIE's 44th Annual Meeting, Charged Particle Optics IV.. Munro, E. (ed.). p. 7-14 8 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1998

Brightness measurements of a Zr/W Schottky electron emitter in a Transmission Electron Microscope

Fransen, MJ., Overwijk, MHF. & Kruit, P., 1998, International Vacuum Electron Sources Conference (IVESC). p. 163-164 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Field emission energy distribution from individual multi-walled carbon nanotubes

Fransen, MJ., van Rooy, TL. & Kruit, P., 1998, International Vacuum Electron Sources Conference (IVESC). p. 11-12 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Finge Field Monochromator for high brightness electron sources

Mook, HW. & Kruit, P., 1998, Proceedings of the 14th International Congress on Electron Microscopy. p. 73-74 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

High Resoluton off-axis holography with a crystal beam splitter

Mertens, BM., Overwijk, MHF. & Kruit, P., 1998, Proceedings of the 14th International Congress on Electron Microscopy. p. 531-532 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

The influence of statistical coulomb interactions on the shape and depth of the langmuir minimum

Nijkerk, MD. & Kruit, P., 1998, International Vacuum Electron Sources Conference (IVESC). p. 169-170 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1997

Design of a lens system to obtain standing electron wave illumination

Mertens, BM. & Kruit, P., 1997, Electron Microscopy and Analysis 1997 IOP series. Rodenburg, JM. (ed.). p. 77-80 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific