Research output per year
Research output per year
Search results
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2009
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
Nihtianov, S., Nanver, LK., Sarubbi, F. & Scholtes, TLM., 2009, Patent No. US 20080315121, Priority date 25 Dec 2008Research output: Patent
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RAdiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
Nihtianov, S., Nanver, LK., Sarubbi, F. & Scholtes, TLM., 2009, Patent No. EP2009705 A2, Priority date 22 Jan 2009Research output: Patent