Research output per year
Research output per year
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Dive into the research topics where S. Soman is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
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High-speed Coherent Fourier Scatterometry: Galvo mirror integration for fast surface inspection
Soman, S., Horsten, R. C. & Pereira, S. F., 2026, In: Measurement: Journal of the International Measurement Confederation. 258, 15 p., 119294.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile -
Aberration characterisation in coherent Fourier scatterometry
Soman, S. & Pereira, S. F., 2025, Optical Measurement Systems for Industrial Inspection XIV. Lehmann, P., Osten, W. & Goncalves, A. A. (eds.). SPIE, 8 p. 135672J. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13567).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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Coherent Fourier scatterometry using rotational scanning
Soman, S., In 't Velt, B., Horsten, R. & Pereira, S., 2025, In: Optical Engineering. 64, 7, 15 p., 074106.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile22 Downloads (Pure) -
Recent developments in coherent Fourier scatterometry
Paul, A., Soman, S. & Pereira, S. F., 2025, In: EPJ Web of Conferences. 335, 2 p., 03041.Research output: Contribution to journal › Conference article › Scientific › peer-review
Open AccessFile11 Downloads (Pure) -
Utilizing focused field as a probe for shape determination of subwavelength structures via coherent Fourier scatterometry
Paul, A., Wever, R., Soman, S. & Pereira, S. F., 2025, In: Physical Review Applied. 23, 2, 11 p., 024016.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile17 Downloads (Pure)
Datasets
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Multi-beam coherent Fourier scatterometry data
Soman, S. (Creator), TU Delft - 4TU.ResearchData, 2025
Dataset/Software: Dataset