Research Output per year
Research Output
2016
A mixing surface acoustic wave device for liquid sensing applications: Design, simulation, and analysis
Bui, T., Morana, B., Scholtes, T., Chu Duc, T. & Sarro, P. M., 2016, In : Journal of Applied Physics. 120, 7, p. 1-10 10 p., 074504.Research output: Contribution to journal › Article › Scientific › peer-review
5
Citations
(Scopus)
A novel mixing surface acoustic wave device for liquid sensing applications
Bui, T. H., Morana, B., Scholtes, T., Chu Duc, T. & Sarro, L., 2016, 2016 IEEE 29th International Conference Micro Electro Mechanical Systems (MEMS). Piscataway, NJ: IEEE, p. 745-748 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
2015
SAW device for liquid vaporization rate and remaining molecule sensing
Bui, TH., Morana, B., Tran, AT., Scholtes, TLM., Chu Duc, T. & Sarro, PM., 2015, Proceedings of the 2015 IEEE SENSORS. Tadigadapa, S. & Lee, J. (eds.). Piscataway: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access
2
Citations
(Scopus)
2014
Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility
Nanver, LK., Qi, L., Mohammadi, V., Mok Kai Rine, C., De Boer, WB., Golshani, N., Sammak, A., Scholtes, TLM., Gottwald, A., Kroth, U. & Scholze, F., 2014, In : IEEE Journal of Selected Topics in Signal Processing. 20, 6, p. 1-11 11 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
36
Citations
(Scopus)
2013
Aluminum-induced iso-epitaxy of silicon for low-temperature fabrication of centimeter-large p+n junctions
Sakic, A., Qi, L., Scholtes, TLM., van der Cingel, J. & Nanver, LK., 2013, In : Solid-State Electronics. 84, June 2013, p. 65-73 9 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
2
Citations
(Scopus)
A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane
Mohammadi, V., De Boer, WB., Scholtes, TLM. & Nanver, LK., 2013, Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting. Fergus et al, JW. (ed.). Pennington: Electrochemical Society, p. 57-65 9 p. (ECS Transactions; vol. 45).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access
4
Citations
(Scopus)
Radiation detector
Nanver, LK., Scholtes, TLM., Sakic, A., Kooijman, CS. & van Veen, GNA., 28 May 2013, Patent No. US8450820 B2, Priority date 14 Jul 2011Research output: Patent
Reverse biasing and breakdown behavior of PureB diodes
Qi, L., Mok, KRC., Aminian, M., Scholtes, TLM., Charbon, E. & Nanver, LK., 2013, Extended abstracts of the 13th International Workshop on Junction Technology. Tsutsui, K., Li, Z. & Mizushima, I. (eds.). Tokyo, Japan: JSAP, p. 70-73 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access
1
Citation
(Scopus)
UV-sensitive low dark-count PureB single-photon avalanche diode
Qi, L., Mok Kai Rine, C., Scholtes, TLM., Aminian, M., Charbon, E. & Nanver, LK., 2013, Proceedings IEEE Sensors 2013. Trew, R. & Brown, E. (eds.). Piscataway, NJ, USA: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access
10
Citations
(Scopus)
2012
Epitaxial growth of large-area p+n diodes at 400 ºC by aluminum-induced crystallization
Sakic, A., Qi, L., Scholtes, TLM., van der Cingel, J. & Nanver, LK., 2012, Proc. of the 42th European Solid-State Device Research Conference (ESSDERC 2012). Bordeaux: IEEE Society, p. 145-148 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access
1
Citation
(Scopus)
High-efficiency silicon photodiode detector for sub-keV electron microscopy
Sakic, A., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., De Boer, WB., Derakhshandeh Kheljani, J., Wien, WHA., Milosavljevic, S. & Nanver, LK., 2012, In : IEEE Transactions on Electron Devices. 59, 10, p. 2707-2714 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
23
Citations
(Scopus)
Pattern dependency of pure-boron-layer chemical-vapor depositions
Mohammadi, V., De Boer, WB., Scholtes, TLM. & Nanver, LK., 2012, In : ECS Transactions. 45, 6, p. 39-48 10 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
Open Access
4
Citations
(Scopus)
Pure dopant deposition of B and Ga for ultrashallow junctions in Si-based devices
Nanver, LK., Sammak, A., Mohammadi, V., Mok, KRC., Qi, L., Sakic, A., Golshani, N., Derakhshandeh, J., Scholtes, TLM. & De Boer, WB., 2012, 27th Symposium on Microelectronics Technology and Devices. p. 25-33 9 p. (ECS Transactions; vol. 49).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access
15
Citations
(Scopus)
2011
Arsenic-doped high-resistivity-silicon epitaxial layers for integrating low-capacitance diodes
Sakic, A., Scholtes, TLM., De Boer, WB., Golshani, N., Derakhshandeh, J. & Nanver, LK., 2011, In : Journal of Electronic Materials. 4, 12, p. 2092-2107 16 p.Research output: Contribution to journal › Article › Scientific › peer-review
5
Citations
(Scopus)
Boron-layer silicon photodiodes for high-efficiency low-energy electron detection
Sakic, A., Nanver, LK., Scholtes, TLM., Heerkens, CTH., Knezevic, T., van Veen, G., Kooijman, K. & Vogelsang, P., 2011, In : Solid-State Electronics. 65-66, p. 38-44 7 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
10
Citations
(Scopus)
Low-complexity full-melt laser-anneal process for fabrication of low-leakage implanted ultrashallow junctions
Biasotto, C., Gonda, V., Nanver, LK., Scholtes, TLM., van der Cingel, J., Vidal, D. & Jovanovic, V., 2011, In : Journal of Electronic Materials. 40, 11, p. 2187-2196 10 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
On the uniformity of pure-boron-layer depositions
Mohammadi, V., de Boer, WD., Scholtes, TLM., Sakic, A., Heerkens, C. T. H. & Nanver, LK., 2011, ICT.OPEN: Micro technology and micro devices (SAFE 2011). Smeulders, A., van der Drift, R., Karelse, F. & Stroobandt, D. (eds.). Veldhoven, The Netherlands: STW, p. 73-75 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Radiation detector
Nanver, LK., Scholtes, TLM., Sakic, A., Kooijman, CS. & van Veen, GNA., 14 Jul 2011, Patent No. US 2011169116 A1, Priority date 14 Jul 2011Research output: Patent
Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy
Sakic, A., Nanver, LK., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., de Boer, W., Wien, WHA., Milosavljevic, S., Heerkens, C. T. H., Knezevic, T. & Spee, I., 2011, ICT.OPEN: Micro technology and micro devices (SAFE 2011). Smeulders, A., van den Drift, R., Karelse, F. & Stroobandt, D. (eds.). Veldhoven, The Netherlands: STW, p. 92-95 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
2010
Characterization of amorphous boron layers as diffusion barrier for pure aluminium
Sakic, A., Jovanovic, V., Maleki, P., Scholtes, TLM., Milosavljevic, S. & Nanver, LK., 2010, 2010 Proceedings of the 33rd International Convention MIPRO. Biljanovic et al, P. (ed.). Rijeka, Croatia: MIPRO, p. 26-29 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
13
Citations
(Scopus)
Deep p+ junctions formed by drive-in from pure boron depositions
Maleki, P., Scholtes, TLM., Popadic, M., Sarubbi, F., Lorito, G., Milosavljevic, S., De Boer, WB. & Nanver, LK., 2010, Extended abstracts 2010 International Workshop on Junction Technology (IWJT). Yu, LJ., Xin, PQ., Guo, PR. & Bing, ZL. (eds.). Los Alamitos, CA, USA: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access
4
Citations
(Scopus)
High effective gummel number of CVD boron layers in ultrashallow p+n diode configurations
Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2010, In : IEEE Transactions on Electron Devices. 57, 6, p. 1269-1278 10 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
40
Citations
(Scopus)
Pure boron chemical vapor deposited layers; A new material for silicon device processing
Nanver, LK., Scholtes, TLM., Sarubbi, F., De Boer, WB., Lorito, G., Sakic, A., Milosavljevic, S., Mok Kai Rine, C., Shi, L., Nihtianov, S. & Buisman, K., 2010, Proceedings 18th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP 2010. Lojek et al, B. (ed.). Piscataway, NJ, USA: IEEE Society, p. 136-139 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access
14
Citations
(Scopus)
Silicon photodiodes for high-efficiency low-energy electron detection
Sakic, A., Nanver, LK., Scholtes, TLM., Heerkens, CTH., van Veen, G., Kooijman, K. & Vogelsang, P., 2010, Proceedings of IEEE 40th European Solid-State Device Research Conference (ESSDERC 2010). Huertas Diaz et al, JL. (ed.). Piscataway, NJ, USA: IEEE Society, p. 102-105 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
8
Citations
(Scopus)
The influence of stacking faults on the leakage current of b-layer p+n diodes
Golshani, N., De Boer, WB., Scholtes, TLM., Sakic, A. & Nanver, LK., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 81-84 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Ultrashallow junction silicon photodiodes for detection of low energy electrons
Sakic, A., Nanver, LK., Scholtes, TLM., Heerkens, CTH., van Veen, G., Kooijman, K. & Vogelsang, P., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 150-153 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection
Sakic, A., Nanver, LK., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., De Boer, WB., Wien, WHA., Milosavljevic, S., Heerkens, CTH., Knezevic, T. & Spee, I., 2010, Proceedings 2010 IEEE International Electron Devices Meeting (IEDM). S.N. (ed.). Piscataway, NJ, USA: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
14
Citations
(Scopus)
2009
Application of amorphous boron layer as diffusion barrier for pure aluminium
Sakic, A., Lorito, G., Sarubbi, F., Scholtes, TLM., van der Cingel, J. & Nanver, LK., 2009, Proc. of SAFE 2009. French, PJ. (ed.). Veldhoven, the Netherlands: STW, p. 112-115 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional
Chemical vapor deposition of alpha-boron layers on silicon for controlled nanometer deep p+n junction formation
Sarubbi, F., Scholtes, TLM. & Nanver, LK., 2009, In : Journal of Electronic Materials. 39, 2, p. 162-173 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
65
Citations
(Scopus)
Controlled Growth of Non-uniform Arsenic Profiles in Silicon RPCVD Epitaxial Layers
Popadic, M., Scholtes, TLM., De Boer, WB., Sarubbi, F. & Nanver, LK., 2009, In : Journal of Electronic Materials. 38, 11, p. 2323-2328 6 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
4
Citations
(Scopus)
high performance silicon based extreme ultraviolet radiation detector for industrial application
Shi, L., Sarubbi, F., Nihtianov, S., Nanver, LK., Scholtes, TLM. & Scholze, F., 2009, high performance silicon based extreme ultraviolet radiation detector for industrial application. s.n. (ed.). porto, portugal: IEEE Society, p. 1891-1896 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
4
Citations
(Scopus)
Improved RF devices for future adaptive wireless systems using two-sided contacting and AIN cooling
Nanver, LK., Schellevis, H., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadic, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2009, In : IEEE Journal of Solid State Circuits. 44, 9, p. 2322-2338 17 p.Research output: Contribution to journal › Article › Scientific › peer-review
12
Citations
(Scopus)
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
Nihtianov, S., Nanver, LK., Sarubbi, F. & Scholtes, TLM., 2009, Patent No. US 20080315121, Priority date 25 Dec 2008Research output: Patent
RAdiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
Nihtianov, S., Nanver, LK., Sarubbi, F. & Scholtes, TLM., 2009, Patent No. EP2009705 A2, Priority date 22 Jan 2009Research output: Patent
Ultra linear low-loss varactor diode configurations for adaptive RF systems
Huang, C., Buisman, K., Nanver, LK., Sarubbi, F., Popadic, M., Scholtes, TLM. & Schellevis, H., 2009, In : IEEE Transactions on Microwave Theory and Techniques. 57, 1, p. 205-215 11 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
22
Citations
(Scopus)
2008
A 67 dBm OIP multi-stacked junction varactor
Huang, C., Buisman, K., Nanver, LK., Sarubbi, F., Popadic, M., Scholtes, TLM., Schellevis, H., Larson, L. & de Vreede, LCN., 2008, In : IEEE Microwave and Wireless Components Letters. 18, 11, p. 749-751 3 p.Research output: Contribution to journal › Article › Scientific › peer-review
9
Citations
(Scopus)
Enabling low-distortion varactors for adaptive transmitters
Huang, C., de Vreede, LCN., Sarubbi, F., Popadic, M., Buisman, K., Qureshi, JH., Marchetti, M., Akhnoukh, AB., Scholtes, TLM., Larson, L. & Nanver, LK., 2008, In : IEEE Transactions on Microwave Theory and Techniques. 56, 5, p. 1149-1163 15 p.Research output: Contribution to journal › Article › Scientific › peer-review
24
Citations
(Scopus)
Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology
Nanver, LK., Sarubbi, F., Gonda, V., Popadic, M., Scholtes, TLM., De Boer, WB. & Buisman, K., 2008, IEEE international workshop on junction technology. Jiang, YL., Qu, XP., Ru, GP. & Li, BZ. (eds.). s.l.: IEEE Society, p. 101-106 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Extremely ultra-shallow p+-n boron-deposited silicon diodes applied to DUV photodiodes
Sarubbi, F., Nanver, LK., Scholtes, TLM. & Nihtianov, S., 2008, 66th annual device research conference. Appenzeller, J. (ed.). s.l.: IEEE Society, p. 143-144 2 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
13
Citations
(Scopus)
High-performance DUV/EUV photodiodes in a pure boron doping technology
Sarubbi, F., Nanver, LK., Scholtes, TLM., Nihtianov, S. & Scholze, F., 2008, The annual workshop on semiconductor advances for future electronics and sensors. s.n. (ed.). Veldhoven, the Netherlands: STW, p. 588-591 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography
Sarubbi, F., Nanver, LK., Scholtes, TLM., Nihtianov, S. & Scholze, F., 2008, IEEE 38th european solid-state device research conference. Hall, S. (ed.). s.l.: IEEE Society, p. 278-281 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
34
Citations
(Scopus)
RF/microwave device fabrication in silicon-on-glass technology
Nanver, LK., Schellevis, H., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadic, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2008, Proc. 26th international conference on microelectronics. Stojadinovic, N. (ed.). Nis, Serbia: IEEE Society, p. 273-280 8 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion
Lorito, G., Gonda, V., Scholtes, TLM. & Nanver, LK., 2008, Proc. 26th international conference on microelectronics. Stojadinovic, N. (ed.). s.l.: s.n., p. 291-294 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
4
Citations
(Scopus)
Special RF/microwave devices in silicon-on-glass technology
Nanver, LK., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadic, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2008, IEEE 2008 bipolar/BiCMOS circuits and technology meeting. Bafleur, M. (ed.). s.l.: IEEE Society, p. 33-40 8 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
2
Citations
(Scopus)
Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology
Nanver, LK., Gonda, V., Civale, Y., Scholtes, TLM., La Spina, L., Schellevis, H., Lorito, G., Sarubbi, F., Popadic, M., Buisman, K., Milosavljevic, S. & Goudena, EJG., 2008, Proc. 9th international conference on solid-state and integrated circuit technology. Tang, T-A., Ru, H., Min, Y. & Xia, A. (eds.). s.l.: ICSICT, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
2007
Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom
Milosavljevi¿, S., Schellevis, H., van Bogaard, A., Scholtes, TLM., Laros, JMW., de Boer, CR., Goudena, EJG. & Nanver, LK., 2007, 2nd International Conference on Engineering Education& Training. s.l. (ed.). Kuwait: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD
Popadic, M., Sarubbi, F., Scholtes, TLM., Milosavljevic, S., de Boer, W. & Nanver, LK., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). s.l.: STW, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Study of boron-doped nm-deep junctions fabricated by B2H6 surface reaction doping
Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). s.l.: STW, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Ultra-Shallow Dopant Diffusion from Pre-deposited RPCVD Monolayers of Arsenic and Phosphorus
Popadic, M., Nanver, LK. & Scholtes, TLM., 2007, Proc. IEEE RTP 2007. s.n. (ed.). Catania, Italy: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
2006
CVD delta-doped boron surface layers for ultra-shallow junction formation
Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2006, Electrochemical Society Transactions, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment. Roozeboom, F. (ed.). Cancun, Mexico: Electrochemical Society, p. 35-44 10 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
22
Citations
(Scopus)