19982016

Research output per year

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Research Output

2016

A mixing surface acoustic wave device for liquid sensing applications: Design, simulation, and analysis

Bui, T., Morana, B., Scholtes, T., Chu Duc, T. & Sarro, P. M., 2016, In : Journal of Applied Physics. 120, 7, p. 1-10 10 p., 074504.

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)

A novel mixing surface acoustic wave device for liquid sensing applications

Bui, T. H., Morana, B., Scholtes, T., Chu Duc, T. & Sarro, L., 2016, 2016 IEEE 29th International Conference Micro Electro Mechanical Systems (MEMS). Piscataway, NJ: IEEE, p. 745-748 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2015

SAW device for liquid vaporization rate and remaining molecule sensing

Bui, TH., Morana, B., Tran, AT., Scholtes, TLM., Chu Duc, T. & Sarro, PM., 2015, Proceedings of the 2015 IEEE SENSORS. Tadigadapa, S. & Lee, J. (eds.). Piscataway: IEEE Society, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
2 Citations (Scopus)
2014

Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility

Nanver, LK., Qi, L., Mohammadi, V., Mok Kai Rine, C., De Boer, WB., Golshani, N., Sammak, A., Scholtes, TLM., Gottwald, A., Kroth, U. & Scholze, F., 2014, In : IEEE Journal of Selected Topics in Signal Processing. 20, 6, p. 1-11 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
36 Citations (Scopus)
2013

Aluminum-induced iso-epitaxy of silicon for low-temperature fabrication of centimeter-large p+n junctions

Sakic, A., Qi, L., Scholtes, TLM., van der Cingel, J. & Nanver, LK., 2013, In : Solid-State Electronics. 84, June 2013, p. 65-73 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
2 Citations (Scopus)

A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane

Mohammadi, V., De Boer, WB., Scholtes, TLM. & Nanver, LK., 2013, Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting. Fergus et al, JW. (ed.). Pennington: Electrochemical Society, p. 57-65 9 p. (ECS Transactions; vol. 45).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
4 Citations (Scopus)

Radiation detector

Nanver, LK., Scholtes, TLM., Sakic, A., Kooijman, CS. & van Veen, GNA., 28 May 2013, Patent No. US8450820 B2, Priority date 14 Jul 2011

Research output: Patent

Reverse biasing and breakdown behavior of PureB diodes

Qi, L., Mok, KRC., Aminian, M., Scholtes, TLM., Charbon, E. & Nanver, LK., 2013, Extended abstracts of the 13th International Workshop on Junction Technology. Tsutsui, K., Li, Z. & Mizushima, I. (eds.). Tokyo, Japan: JSAP, p. 70-73 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
1 Citation (Scopus)

UV-sensitive low dark-count PureB single-photon avalanche diode

Qi, L., Mok Kai Rine, C., Scholtes, TLM., Aminian, M., Charbon, E. & Nanver, LK., 2013, Proceedings IEEE Sensors 2013. Trew, R. & Brown, E. (eds.). Piscataway, NJ, USA: IEEE Society, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
10 Citations (Scopus)
2012

Epitaxial growth of large-area p+n diodes at 400 ºC by aluminum-induced crystallization

Sakic, A., Qi, L., Scholtes, TLM., van der Cingel, J. & Nanver, LK., 2012, Proc. of the 42th European Solid-State Device Research Conference (ESSDERC 2012). Bordeaux: IEEE Society, p. 145-148 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
1 Citation (Scopus)

High-efficiency silicon photodiode detector for sub-keV electron microscopy

Sakic, A., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., De Boer, WB., Derakhshandeh Kheljani, J., Wien, WHA., Milosavljevic, S. & Nanver, LK., 2012, In : IEEE Transactions on Electron Devices. 59, 10, p. 2707-2714 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
23 Citations (Scopus)

Pattern dependency of pure-boron-layer chemical-vapor depositions

Mohammadi, V., De Boer, WB., Scholtes, TLM. & Nanver, LK., 2012, In : ECS Transactions. 45, 6, p. 39-48 10 p.

Research output: Contribution to journalConference articleScientificpeer-review

Open Access
4 Citations (Scopus)

Pure dopant deposition of B and Ga for ultrashallow junctions in Si-based devices

Nanver, LK., Sammak, A., Mohammadi, V., Mok, KRC., Qi, L., Sakic, A., Golshani, N., Derakhshandeh, J., Scholtes, TLM. & De Boer, WB., 2012, 27th Symposium on Microelectronics Technology and Devices. p. 25-33 9 p. (ECS Transactions; vol. 49).

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
15 Citations (Scopus)
2011

Arsenic-doped high-resistivity-silicon epitaxial layers for integrating low-capacitance diodes

Sakic, A., Scholtes, TLM., De Boer, WB., Golshani, N., Derakhshandeh, J. & Nanver, LK., 2011, In : Journal of Electronic Materials. 4, 12, p. 2092-2107 16 p.

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)

Boron-layer silicon photodiodes for high-efficiency low-energy electron detection

Sakic, A., Nanver, LK., Scholtes, TLM., Heerkens, CTH., Knezevic, T., van Veen, G., Kooijman, K. & Vogelsang, P., 2011, In : Solid-State Electronics. 65-66, p. 38-44 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
10 Citations (Scopus)

Low-complexity full-melt laser-anneal process for fabrication of low-leakage implanted ultrashallow junctions

Biasotto, C., Gonda, V., Nanver, LK., Scholtes, TLM., van der Cingel, J., Vidal, D. & Jovanovic, V., 2011, In : Journal of Electronic Materials. 40, 11, p. 2187-2196 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access

On the uniformity of pure-boron-layer depositions

Mohammadi, V., de Boer, WD., Scholtes, TLM., Sakic, A., Heerkens, C. T. H. & Nanver, LK., 2011, ICT.OPEN: Micro technology and micro devices (SAFE 2011). Smeulders, A., van der Drift, R., Karelse, F. & Stroobandt, D. (eds.). Veldhoven, The Netherlands: STW, p. 73-75 3 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Radiation detector

Nanver, LK., Scholtes, TLM., Sakic, A., Kooijman, CS. & van Veen, GNA., 14 Jul 2011, Patent No. US 2011169116 A1, Priority date 14 Jul 2011

Research output: Patent

Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

Sakic, A., Nanver, LK., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., de Boer, W., Wien, WHA., Milosavljevic, S., Heerkens, C. T. H., Knezevic, T. & Spee, I., 2011, ICT.OPEN: Micro technology and micro devices (SAFE 2011). Smeulders, A., van den Drift, R., Karelse, F. & Stroobandt, D. (eds.). Veldhoven, The Netherlands: STW, p. 92-95 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2010

Characterization of amorphous boron layers as diffusion barrier for pure aluminium

Sakic, A., Jovanovic, V., Maleki, P., Scholtes, TLM., Milosavljevic, S. & Nanver, LK., 2010, 2010 Proceedings of the 33rd International Convention MIPRO. Biljanovic et al, P. (ed.). Rijeka, Croatia: MIPRO, p. 26-29 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

13 Citations (Scopus)

Deep p+ junctions formed by drive-in from pure boron depositions

Maleki, P., Scholtes, TLM., Popadic, M., Sarubbi, F., Lorito, G., Milosavljevic, S., De Boer, WB. & Nanver, LK., 2010, Extended abstracts 2010 International Workshop on Junction Technology (IWJT). Yu, LJ., Xin, PQ., Guo, PR. & Bing, ZL. (eds.). Los Alamitos, CA, USA: IEEE Society, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
4 Citations (Scopus)

High effective gummel number of CVD boron layers in ultrashallow p+n diode configurations

Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2010, In : IEEE Transactions on Electron Devices. 57, 6, p. 1269-1278 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
40 Citations (Scopus)

Pure boron chemical vapor deposited layers; A new material for silicon device processing

Nanver, LK., Scholtes, TLM., Sarubbi, F., De Boer, WB., Lorito, G., Sakic, A., Milosavljevic, S., Mok Kai Rine, C., Shi, L., Nihtianov, S. & Buisman, K., 2010, Proceedings 18th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP 2010. Lojek et al, B. (ed.). Piscataway, NJ, USA: IEEE Society, p. 136-139 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Open Access
14 Citations (Scopus)

Silicon photodiodes for high-efficiency low-energy electron detection

Sakic, A., Nanver, LK., Scholtes, TLM., Heerkens, CTH., van Veen, G., Kooijman, K. & Vogelsang, P., 2010, Proceedings of IEEE 40th European Solid-State Device Research Conference (ESSDERC 2010). Huertas Diaz et al, JL. (ed.). Piscataway, NJ, USA: IEEE Society, p. 102-105 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

8 Citations (Scopus)

The influence of stacking faults on the leakage current of b-layer p+n diodes

Golshani, N., De Boer, WB., Scholtes, TLM., Sakic, A. & Nanver, LK., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 81-84 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Ultrashallow junction silicon photodiodes for detection of low energy electrons

Sakic, A., Nanver, LK., Scholtes, TLM., Heerkens, CTH., van Veen, G., Kooijman, K. & Vogelsang, P., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 150-153 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

Sakic, A., Nanver, LK., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., De Boer, WB., Wien, WHA., Milosavljevic, S., Heerkens, CTH., Knezevic, T. & Spee, I., 2010, Proceedings 2010 IEEE International Electron Devices Meeting (IEDM). S.N. (ed.). Piscataway, NJ, USA: IEEE Society, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

14 Citations (Scopus)
2009

Application of amorphous boron layer as diffusion barrier for pure aluminium

Sakic, A., Lorito, G., Sarubbi, F., Scholtes, TLM., van der Cingel, J. & Nanver, LK., 2009, Proc. of SAFE 2009. French, PJ. (ed.). Veldhoven, the Netherlands: STW, p. 112-115 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionProfessional

Chemical vapor deposition of alpha-boron layers on silicon for controlled nanometer deep p+n junction formation

Sarubbi, F., Scholtes, TLM. & Nanver, LK., 2009, In : Journal of Electronic Materials. 39, 2, p. 162-173 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
65 Citations (Scopus)

Controlled Growth of Non-uniform Arsenic Profiles in Silicon RPCVD Epitaxial Layers

Popadic, M., Scholtes, TLM., De Boer, WB., Sarubbi, F. & Nanver, LK., 2009, In : Journal of Electronic Materials. 38, 11, p. 2323-2328 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
4 Citations (Scopus)

high performance silicon based extreme ultraviolet radiation detector for industrial application

Shi, L., Sarubbi, F., Nihtianov, S., Nanver, LK., Scholtes, TLM. & Scholze, F., 2009, high performance silicon based extreme ultraviolet radiation detector for industrial application. s.n. (ed.). porto, portugal: IEEE Society, p. 1891-1896 6 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)

Improved RF devices for future adaptive wireless systems using two-sided contacting and AIN cooling

Nanver, LK., Schellevis, H., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadic, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2009, In : IEEE Journal of Solid State Circuits. 44, 9, p. 2322-2338 17 p.

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)

Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector

Nihtianov, S., Nanver, LK., Sarubbi, F. & Scholtes, TLM., 2009, Patent No. US 20080315121, Priority date 25 Dec 2008

Research output: Patent

RAdiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector

Nihtianov, S., Nanver, LK., Sarubbi, F. & Scholtes, TLM., 2009, Patent No. EP2009705 A2, Priority date 22 Jan 2009

Research output: Patent

Ultra linear low-loss varactor diode configurations for adaptive RF systems

Huang, C., Buisman, K., Nanver, LK., Sarubbi, F., Popadic, M., Scholtes, TLM. & Schellevis, H., 2009, In : IEEE Transactions on Microwave Theory and Techniques. 57, 1, p. 205-215 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
22 Citations (Scopus)
2008

A 67 dBm OIP multi-stacked junction varactor

Huang, C., Buisman, K., Nanver, LK., Sarubbi, F., Popadic, M., Scholtes, TLM., Schellevis, H., Larson, L. & de Vreede, LCN., 2008, In : IEEE Microwave and Wireless Components Letters. 18, 11, p. 749-751 3 p.

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Enabling low-distortion varactors for adaptive transmitters

Huang, C., de Vreede, LCN., Sarubbi, F., Popadic, M., Buisman, K., Qureshi, JH., Marchetti, M., Akhnoukh, AB., Scholtes, TLM., Larson, L. & Nanver, LK., 2008, In : IEEE Transactions on Microwave Theory and Techniques. 56, 5, p. 1149-1163 15 p.

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)

Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

Nanver, LK., Sarubbi, F., Gonda, V., Popadic, M., Scholtes, TLM., De Boer, WB. & Buisman, K., 2008, IEEE international workshop on junction technology. Jiang, YL., Qu, XP., Ru, GP. & Li, BZ. (eds.). s.l.: IEEE Society, p. 101-106 6 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Extremely ultra-shallow p+-n boron-deposited silicon diodes applied to DUV photodiodes

Sarubbi, F., Nanver, LK., Scholtes, TLM. & Nihtianov, S., 2008, 66th annual device research conference. Appenzeller, J. (ed.). s.l.: IEEE Society, p. 143-144 2 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

13 Citations (Scopus)

High-performance DUV/EUV photodiodes in a pure boron doping technology

Sarubbi, F., Nanver, LK., Scholtes, TLM., Nihtianov, S. & Scholze, F., 2008, The annual workshop on semiconductor advances for future electronics and sensors. s.n. (ed.). Veldhoven, the Netherlands: STW, p. 588-591 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography

Sarubbi, F., Nanver, LK., Scholtes, TLM., Nihtianov, S. & Scholze, F., 2008, IEEE 38th european solid-state device research conference. Hall, S. (ed.). s.l.: IEEE Society, p. 278-281 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

34 Citations (Scopus)

RF/microwave device fabrication in silicon-on-glass technology

Nanver, LK., Schellevis, H., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadic, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2008, Proc. 26th international conference on microelectronics. Stojadinovic, N. (ed.). Nis, Serbia: IEEE Society, p. 273-280 8 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion

Lorito, G., Gonda, V., Scholtes, TLM. & Nanver, LK., 2008, Proc. 26th international conference on microelectronics. Stojadinovic, N. (ed.). s.l.: s.n., p. 291-294 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)

Special RF/microwave devices in silicon-on-glass technology

Nanver, LK., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadic, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2008, IEEE 2008 bipolar/BiCMOS circuits and technology meeting. Bafleur, M. (ed.). s.l.: IEEE Society, p. 33-40 8 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology

Nanver, LK., Gonda, V., Civale, Y., Scholtes, TLM., La Spina, L., Schellevis, H., Lorito, G., Sarubbi, F., Popadic, M., Buisman, K., Milosavljevic, S. & Goudena, EJG., 2008, Proc. 9th international conference on solid-state and integrated circuit technology. Tang, T-A., Ru, H., Min, Y. & Xia, A. (eds.). s.l.: ICSICT, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2007

Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom

Milosavljevi¿, S., Schellevis, H., van Bogaard, A., Scholtes, TLM., Laros, JMW., de Boer, CR., Goudena, EJG. & Nanver, LK., 2007, 2nd International Conference on Engineering Education& Training. s.l. (ed.). Kuwait: s.n., p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

Popadic, M., Sarubbi, F., Scholtes, TLM., Milosavljevic, S., de Boer, W. & Nanver, LK., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). s.l.: STW, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Study of boron-doped nm-deep junctions fabricated by B2H6 surface reaction doping

Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). s.l.: STW, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Ultra-Shallow Dopant Diffusion from Pre-deposited RPCVD Monolayers of Arsenic and Phosphorus

Popadic, M., Nanver, LK. & Scholtes, TLM., 2007, Proc. IEEE RTP 2007. s.n. (ed.). Catania, Italy: IEEE Society, p. 1-4 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2006

CVD delta-doped boron surface layers for ultra-shallow junction formation

Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2006, Electrochemical Society Transactions, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment. Roozeboom, F. (ed.). Cancun, Mexico: Electrochemical Society, p. 35-44 10 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

22 Citations (Scopus)