T.L.M. Scholtes

Search results

• 2016

  A novel mixing surface acoustic wave device for liquid sensing applications

  Bui, T. H., Morana, B., Scholtes, T., Chu Duc, T. & Sarro, L., 2016, 2016 IEEE 29th International Conference Micro Electro Mechanical Systems (MEMS). Piscataway, NJ: IEEE, p. 745-748 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  • surfaces 100%
  • applications 100%
  • mixing 100%
  • liquids 100%
  • devices 100%
• 2015

  SAW device for liquid vaporization rate and remaining molecule sensing

  Bui, TH., Morana, B., Tran, AT., Scholtes, TLM., Chu Duc, T. & Sarro, PM., 2015, Proceedings of the 2015 IEEE SENSORS. Tadigadapa, S. & Lee, J. (eds.). Piscataway: IEEE, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  2 Citations (Scopus)
• 2013

  A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane

  Mohammadi, V., De Boer, WB., Scholtes, TLM. & Nanver, LK., 2013, Proceedings - Symposium on Thermal and Plasma CVD of Nanostructures and their Applications - 221st ECS Meeting. Fergus et al, JW. (ed.). Pennington: Electrochemical Society, p. 57-65 9 p. (ECS Transactions; vol. 45).

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  4 Citations (Scopus)

• Reverse biasing and breakdown behavior of PureB diodes

  Qi, L., Mok, KRC., Aminian, M., Scholtes, TLM., Charbon, E. & Nanver, LK., 2013, Extended abstracts of the 13th International Workshop on Junction Technology. Tsutsui, K., Li, Z. & Mizushima, I. (eds.). Tokyo, Japan: JSAP, p. 70-73 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  1 Citation (Scopus)

• UV-sensitive low dark-count PureB single-photon avalanche diode

  Qi, L., Mok Kai Rine, C., Scholtes, TLM., Aminian, M., Charbon, E. & Nanver, LK., 2013, Proceedings IEEE Sensors 2013. Trew, R. & Brown, E. (eds.). Piscataway, NJ, USA: IEEE, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  11 Citations (Scopus)
• 2012

  Epitaxial growth of large-area p+n diodes at 400 ºC by aluminum-induced crystallization

  Sakic, A., Qi, L., Scholtes, TLM., van der Cingel, J. & Nanver, LK., 2012, Proc. of the 42th European Solid-State Device Research Conference (ESSDERC 2012). Bordeaux: IEEE, p. 145-148 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  1 Citation (Scopus)

• Pure dopant deposition of B and Ga for ultrashallow junctions in Si-based devices

  Nanver, LK., Sammak, A., Mohammadi, V., Mok, KRC., Qi, L., Sakic, A., Golshani, N., Derakhshandeh, J., Scholtes, TLM. & De Boer, WB., 2012, 27th Symposium on Microelectronics Technology and Devices. p. 25-33 9 p. (ECS Transactions; vol. 49).

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  19 Citations (Scopus)
• 2011

  On the uniformity of pure-boron-layer depositions

  Mohammadi, V., de Boer, WD., Scholtes, TLM., Sakic, A., Heerkens, C. T. H. & Nanver, LK., 2011, ICT.OPEN: Micro technology and micro devices (SAFE 2011). Smeulders, A., van der Drift, R., Karelse, F. & Stroobandt, D. (eds.). Veldhoven, The Netherlands: STW, p. 73-75 3 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

  Sakic, A., Nanver, LK., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., de Boer, W., Wien, WHA., Milosavljevic, S., Heerkens, C. T. H., Knezevic, T. & Spee, I., 2011, ICT.OPEN: Micro technology and micro devices (SAFE 2011). Smeulders, A., van den Drift, R., Karelse, F. & Stroobandt, D. (eds.). Veldhoven, The Netherlands: STW, p. 92-95 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2010

  Characterization of amorphous boron layers as diffusion barrier for pure aluminium

  Sakic, A., Jovanovic, V., Maleki, P., Scholtes, TLM., Milosavljevic, S. & Nanver, LK., 2010, 2010 Proceedings of the 33rd International Convention MIPRO. Biljanovic et al, P. (ed.). Rijeka, Croatia: MIPRO, p. 26-29 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  15 Citations (Scopus)

• Deep p+ junctions formed by drive-in from pure boron depositions

  Maleki, P., Scholtes, TLM., Popadic, M., Sarubbi, F., Lorito, G., Milosavljevic, S., De Boer, WB. & Nanver, LK., 2010, Extended abstracts 2010 International Workshop on Junction Technology (IWJT). Yu, LJ., Xin, PQ., Guo, PR. & Bing, ZL. (eds.). Los Alamitos, CA, USA: IEEE, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  4 Citations (Scopus)

• Pure boron chemical vapor deposited layers; A new material for silicon device processing

  Nanver, LK., Scholtes, TLM., Sarubbi, F., De Boer, WB., Lorito, G., Sakic, A., Milosavljevic, S., Mok Kai Rine, C., Shi, L., Nihtianov, S. & Buisman, K., 2010, Proceedings 18th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP 2010. Lojek et al, B. (ed.). Piscataway, NJ, USA: IEEE, p. 136-139 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  Open Access
  17 Citations (Scopus)

• Silicon photodiodes for high-efficiency low-energy electron detection

  Sakic, A., Nanver, LK., Scholtes, TLM., Heerkens, CTH., van Veen, G., Kooijman, K. & Vogelsang, P., 2010, Proceedings of IEEE 40th European Solid-State Device Research Conference (ESSDERC 2010). Huertas Diaz et al, JL. (ed.). Piscataway, NJ, USA: IEEE, p. 102-105 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
  9 Citations (Scopus)

• The influence of stacking faults on the leakage current of b-layer p+n diodes

  Golshani, N., De Boer, WB., Scholtes, TLM., Sakic, A. & Nanver, LK., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 81-84 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Ultrashallow junction silicon photodiodes for detection of low energy electrons

  Sakic, A., Nanver, LK., Scholtes, TLM., Heerkens, CTH., van Veen, G., Kooijman, K. & Vogelsang, P., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 150-153 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

  Sakic, A., Nanver, LK., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., De Boer, WB., Wien, WHA., Milosavljevic, S., Heerkens, CTH., Knezevic, T. & Spee, I., 2010, Proceedings 2010 IEEE International Electron Devices Meeting (IEDM). S.N. (ed.). Piscataway, NJ, USA: IEEE, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  23 Citations (Scopus)
• 2009

  Application of amorphous boron layer as diffusion barrier for pure aluminium

  Sakic, A., Lorito, G., Sarubbi, F., Scholtes, TLM., van der Cingel, J. & Nanver, LK., 2009, Proc. of SAFE 2009. French, PJ. (ed.). Veldhoven, the Netherlands: STW, p. 112-115 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional

• high performance silicon based extreme ultraviolet radiation detector for industrial application

  Shi, L., Sarubbi, F., Nihtianov, S., Nanver, LK., Scholtes, TLM. & Scholze, F., 2009, high performance silicon based extreme ultraviolet radiation detector for industrial application. s.n. (ed.). porto, portugal: IEEE, p. 1891-1896 6 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  4 Citations (Scopus)
• 2008

  Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

  Nanver, LK., Sarubbi, F., Gonda, V., Popadic, M., Scholtes, TLM., De Boer, WB. & Buisman, K., 2008, IEEE international workshop on junction technology. Jiang, YL., Qu, XP., Ru, GP. & Li, BZ. (eds.). s.l.: IEEE, p. 101-106 6 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  1 Citation (Scopus)

• Extremely ultra-shallow p+-n boron-deposited silicon diodes applied to DUV photodiodes

  Sarubbi, F., Nanver, LK., Scholtes, TLM. & Nihtianov, S., 2008, 66th annual device research conference. Appenzeller, J. (ed.). s.l.: IEEE, p. 143-144 2 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  14 Citations (Scopus)

• High-performance DUV/EUV photodiodes in a pure boron doping technology

  Sarubbi, F., Nanver, LK., Scholtes, TLM., Nihtianov, S. & Scholze, F., 2008, The annual workshop on semiconductor advances for future electronics and sensors. s.n. (ed.). Veldhoven, the Netherlands: STW, p. 588-591 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography

  Sarubbi, F., Nanver, LK., Scholtes, TLM., Nihtianov, S. & Scholze, F., 2008, IEEE 38th european solid-state device research conference. Hall, S. (ed.). s.l.: IEEE, p. 278-281 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  37 Citations (Scopus)

• RF/microwave device fabrication in silicon-on-glass technology

  Nanver, LK., Schellevis, H., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadic, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2008, Proc. 26th international conference on microelectronics. Stojadinovic, N. (ed.). Nis, Serbia: IEEE, p. 273-280 8 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion

  Lorito, G., Gonda, V., Scholtes, TLM. & Nanver, LK., 2008, Proc. 26th international conference on microelectronics. Stojadinovic, N. (ed.). s.l.: s.n., p. 291-294 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  5 Citations (Scopus)

• Special RF/microwave devices in silicon-on-glass technology

  Nanver, LK., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadic, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2008, IEEE 2008 bipolar/BiCMOS circuits and technology meeting. Bafleur, M. (ed.). s.l.: IEEE, p. 33-40 8 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  4 Citations (Scopus)

• Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology

  Nanver, LK., Gonda, V., Civale, Y., Scholtes, TLM., La Spina, L., Schellevis, H., Lorito, G., Sarubbi, F., Popadic, M., Buisman, K., Milosavljevic, S. & Goudena, EJG., 2008, Proc. 9th international conference on solid-state and integrated circuit technology. Tang, T-A., Ru, H., Min, Y. & Xia, A. (eds.). s.l.: ICSICT, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2007

  Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom

  Milosavljevi¿, S., Schellevis, H., van Bogaard, A., Scholtes, TLM., Laros, JMW., de Boer, CR., Goudena, EJG. & Nanver, LK., 2007, 2nd International Conference on Engineering Education& Training. s.l. (ed.). Kuwait: s.n., p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

  Popadic, M., Sarubbi, F., Scholtes, TLM., Milosavljevic, S., de Boer, W. & Nanver, LK., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). s.l.: STW, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Study of boron-doped nm-deep junctions fabricated by B2H6 surface reaction doping

  Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). s.l.: STW, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Ultra-Shallow Dopant Diffusion from Pre-deposited RPCVD Monolayers of Arsenic and Phosphorus

  Popadic, M., Nanver, LK. & Scholtes, TLM., 2007, Proc. IEEE RTP 2007. s.n. (ed.). Catania, Italy: IEEE, p. 1-4 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2006

  CVD delta-doped boron surface layers for ultra-shallow junction formation

  Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2006, Electrochemical Society Transactions, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment. Roozeboom, F. (ed.). Cancun, Mexico: Electrochemical Society, p. 35-44 10 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  28 Citations (Scopus)

• Degradation of Diode Junction Characteristics due to Residual Defects Caused by Laser-Annealed Implantations Studied by Bipolar Test Structures

  Gonda, V., Scholtes, TLM. & Nanver, LK., 2006, Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. s.n. (ed.). Veldhoven, The Netherlands: s.l., p. 423-426 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Electrical Characterization of Residual Bulk Defects after Laser Annealing of Implanted Shallow Junctions

  Liu, S., Gonda, V., Scholtes, TLM. & Nanver, LK., 2006, Proc. IEEE International Workshop on Junctions Technology. s.n. (ed.). Shanghai, China: Electron Device Society, p. 112-115 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  1 Citation (Scopus)

• Electrical Characterization of Residual Implantation-Induced Defects in the Vicinity of Laser-Annealed Implanted Ultrashallow Junctions in Doping Engineering for Device Fabrication

  Gonda, V., Liu, S., Scholtes, TLM. & Nanver, LK., 2006, Material Research Society Symposium Proceedings (912, Warrendale, PA). Pawlak, BJ. (ed.). San Francisco, USA: Material Research Society, p. -

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Profile Engineering of Decreasing Arsenic Doping in Silicon RPCVD

  Popadic, M., Sarubbi, F., Scholtes, TLM., Milosavljevic, S., De Boer, WB. & Nanver, LK., 2006, Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. s.n (ed.). Veldhoven, The Netherlands: s.l., p. 475-478 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes

  Lorito, G., Gonda, V., Liu, S., Scholtes, TLM., Schellevis, H. & Nanver, LK., 2006, Proc. IEEE International Conference on Microelectronics. s.n. (ed.). Belgrade, Serbia: Electron Device Society, p. 369-372 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  2 Citations (Scopus)

• Schottky barrier height modulation by ultra-shallow low-dose dopant diffusion

  Popadic, M., Nanver, LK. & Scholtes, TLM., 2006, 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings. s.n. (ed.). Shanghai, China: Electron Device Society, p. 469-471 3 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  4 Citations (Scopus)

• Silicon-on-glass technology for RF and microwave device fabrication

  Nanver, LK., Schellevis, H., Scholtes, TLM., La Spina, L., Lorito, G., Sarubbi, F., Gonda, V., Popadi¿, M., Buisman, K., de Vreede, LCN., Huang, C., Milosavljevic, S. & Goudena, EJG., 2006, 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings. s.n. (ed.). Shanghai, China: IEEE, p. 162-165 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  1 Citation (Scopus)

• Uniformity of Chemical Vapor Deposited Boron-Silicide Layers on Silicon

  Sarubbi, F., Nanver, LK. & Scholtes, TLM., 2006, Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. s.n. (ed.). Veldhoven, The Netherlands: s.l., p. 479-482 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

• Versatile n-type profile engineering by controlling arsenic surface segregation in silicon RPCVD

  Popadic, M., Sarubbi, F., Scholtes, TLM. & Nanver, LK., 2006, ECS Transactions. s.n (ed.). Ouro Preto, Brazil: Electrochemical Society, p. 393-399 7 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  1 Citation (Scopus)
• 2005

  Distortion-free varactor diode topologies for RF adaptivity

  Buisman, K., de Vreede, LCN., Larson, LE., Spirito, M., Akhnoukh, AB., Scholtes, TLM. & Nanver, LK., 2005, Proceedings IEEE MTT-S International Microwave Symposium Digest. Choudhury, D. (ed.). Piscataway: IEEE, p. 157-160 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  75 Citations (Scopus)

• High-performance varactor diodes integrated in a silicon-on-glass technology

  Buisman, K., Nanver, LK., Scholtes, TLM., Schellevis, H. & de Vreede, LCN., 2005, Proceedings of the 35th European solid-state device research conference (ESSDERC). Ghibaudo, G., Skotnicki, T., Cristoloveanu, S. & Brillouet, M. (eds.). Piscataway: IEEE, p. 117-120 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  18 Citations (Scopus)

• Near-ideal implanted shallow-junction diode formation by excimer laser annealing

  Gonda, V., Bourtsev, A., Scholtes, TLM. & Nanver, LK., 2005, Proceedings of the 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors. s.n. (ed.). Piscataway: IEEE, p. 93-100 8 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  13 Citations (Scopus)

• The effect of the contact window edges on the perimeter currents of shallow junction diodes

  Gonda, V., Scholtes, TLM. & Nanver, LK., 2005, Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). s.n. (ed.). Utrecht, The Netherlands: Dutch Technology Foundation, p. 88-91 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2004

  Surface roughness of contact windows for shallow junction formation

  Gonda, V., Burtsev, A., Scholtes, TLM. & Nanver, LK., 2004, SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics. Utrecht: STW Technology Foundation, p. 639-642 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2003

  Electrical characterization of silicon diodes formed by laser annealing of implanted dopants

  Nanver, LK., Slabbekoorn, JHCM., Burtsev, A., Scholtes, TLM., Surdeanu, R., Simonetti, F., Kalhert, HJ. & Slotboom, JW., 2003, Advanced short-time thermal processing for Si-based CMOS devices. Roozeboom, F., Gusev, E., Chen, LJ., Ozturk, MC., Kwong, DL. & Timans, PJ. (eds.). Pennington, USA: The Electrochemical Society, p. 119-130 12 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
• 2002

  CV doping profiling of boron out-diffusion using an abrupt and highly doped arsenic buried epilayer

  Ortiz, C., Nanver, LK., van Noort, WD., Scholtes, TLM. & Slotboom, JW., 2002, ICMTS 2002 IEEE 2002 International Conference on Microelectronic Test Structures. Piscataway, NJ. USA: IEEE, p. 83-88 6 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  5 Citations (Scopus)

• CV-doping profiling of shallow junctions with an abrupt and highly doped arsenic buried epilayer

  Ortiz, C., Nanver, LK., van Noort, WD., Scholtes, TLM. & Slotboom, JW., 2002, SAFE 2002 Proceedings of the 5th Semiconductor Advances for Future Electronics Workshop. Utrecht: STW Technology Foundation, p. 75-80 6 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  275 Citations (Scopus)

• Direct spray coating of photoresist - a new method for patterning 3-D structures

  Pham, PN., Scholtes, TLM., Klerks, R., Boellaard, E., Sarro, PM. & Burghartz, JN., 2002, Proceedings Eurosensors XVI. Saneistr, J. & Ripka, P. (eds.). Prague: Czech Technical University, p. 182-185 4 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
• 2001

  Direct spray coating of photoresist for MEMS applications

  Pham, PN., Scholtes, TLM., Klerk, R., Wieder, B., Sarro, PM. & Burghartz, JN., 2001, Proceedings of SPIE. Vol. 4557. J-M Karam & J Yasaitis (eds.). Bellingham: International Society for Optical Engineering, p. 312-319 8 p.

  Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

  16 Citations (Scopus)