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Research Output

High-efficiency silicon photodiode detector for sub-keV electron microscopy

Sakic, A., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., De Boer, WB., Derakhshandeh Kheljani, J., Wien, WHA., Milosavljevic, S. & Nanver, LK., 2012, In : IEEE Transactions on Electron Devices. 59, 10, p. 2707-2714 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
23 Citations (Scopus)

Microcantilevers encapsulated in fluid wells for sensing in liquids

Venstra, WJ., Wien, WHA., Sarro, PM. & van Eijk, J., 2012, In : Microelectronic Engineering. 97, p. 247-250 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
3 Citations (Scopus)

Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating

Saadaoui, M., van Zeijl, H., Wien, WHA., Pham, HTM., Kwakernaak, C., Knoops, HCM., Kessels, WMM., van de Sanden, RMCM., Voogt, FC., Roozeboom, F. & Sarro, PM., 2011, In : IEEE Transactions on Components and Packaging Technology. 1, 11, p. 1728-1738 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
7 Citations (Scopus)

Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

Sakic, A., Nanver, LK., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., de Boer, W., Wien, WHA., Milosavljevic, S., Heerkens, C. T. H., Knezevic, T. & Spee, I., 2011, ICT.OPEN: Micro technology and micro devices (SAFE 2011). Smeulders, A., van den Drift, R., Karelse, F. & Stroobandt, D. (eds.). Veldhoven, The Netherlands: STW, p. 92-95 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits

Vollebregt, S., Ishihara, R., Wien, WHA., van der Cingel, J. & Beenakker, CIM., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 184-187 4 p.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review