Vollebregt, S.,
Alfano, B.,
Ricciardella, F.,
Giesbers, A. J. M.,
Grachova, Y.,
van Zeijl, H.,
Polichetti, T. &
Sarro, L.,
Jan 2016,
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, NJ:
IEEE ,
p. 17-20 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review