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Research Output

  • 4 Article
  • 2 Conference contribution
  • 1 Patent

Optical device and method for measuring spatially-varying aberrations of an imaging system

Shao, Y., 2020, IPC No. G01M, G03F, Priority date 14 Aug 2018, Priority No. NL 2021468

Research output: Patent

Phase detection of coherence singularities and determination of the topological charge of a partially coherent vortex beam

Lu, X., Zhao, C., Shao, Y., Zeng, J., Konijnenberg, S., Zhu, X., Popov, S., Urbach, H. P. & Cai, Y., 2019, In : Applied Physics Letters. 114, 20, 5 p., 201106.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
  • 6 Citations (Scopus)
    12 Downloads (Pure)

    Spatially varying aberration calibration using a pair of matched periodic pinhole array masks

    Shao, Y., Loktev, M., Tang, Y., Bociort, F. & Urbach, H. P., 2019, In : Optics Express. 27, 2, p. 729-742

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
  • 1 Citation (Scopus)
    82 Downloads (Pure)

    Spatial coherence measurement and partially coherent diffractive imaging using self-referencing holography

    Shao, Y., Lu, X., Konijnenberg, S., Zhao, C., Cai, Y. & Urbach, P., 2018, In : Optics Express. 26, 4, p. 4479-4490 12 p.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
  • 12 Citations (Scopus)
    47 Downloads (Pure)

    Projection lens testing with Moiré effect

    Loktev, M. & Shao, Y., 2017, Metrology, Inspection, and Process Control for Microlithography XXXI. Sanchez, M. I. (ed.). Bellingham, WA, USA: SPIE, 8 p. 101452S. (Proceedings of SPIE; vol. 10145).

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Open Access
    File
  • 1 Citation (Scopus)
    75 Downloads (Pure)

    Activities

    • 1 Talk or presentation at a conference

    Wavefront shaping with an electrowetting liquid lens using surface harmonics

    Matthias Strauch (Speaker), , Sander Konijnenberg (Speaker), , Yifeng Shao (Speaker), & Paul Urbach (Speaker)

    28 Jan 2017

    Activity: Talk or presentationTalk or presentation at a conference