Determination of line edge roughness in low dose top-down scanning electron microscopy images

  • T. Verduin (Recipient)

    Prize: Prize (including medals and awards)

    Prize (including medals and awards)

    eventThe 2014 Karel Urbanek Best Student Paper Award at SPIE Conference . 23 ¿ 27 February 2014
    locationSan José, California, USA
    Period23 Feb 2014 → 27 Feb 2014