Determination of line edge roughness in low dose top-down scanning electron microscopy images

  • Verduin, T. (Recipient)

    Prize: Prize (including medals and awards)

    Awarded at event

    Event titleThe 2014 Karel Urbanek Best Student Paper Award at SPIE Conference . 23 ¿ 27 February 2014
    LocationSan José, California, USAShow on map
    Period23 Feb 2014 → 27 Feb 2014