Determination of line edge roughness in low dose top-down scanning electron microscopy images

  • T. Verduin (Recipient)

Prize: Prize (including medals and awards)

Prize (including medals and awards)

eventThe 2014 Karel Urbanek Best Student Paper Award at SPIE Conference . 23 ¿ 27 February 2014
locationSan José, California, USA
Period23 Feb 2014 → 27 Feb 2014