10 nm lines and spaces written in HSQ using electron beam lithography

Research output: Contribution to journalArticleScientificpeer-review

77 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)822-824
Number of pages3
JournalMicroelectronic Engineering
Volume84
Publication statusPublished - 2007

Keywords

  • academic journal papers
  • CWTS JFIS < 0.75

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