12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide

E Connolly, PJ French, TMH Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of IEEE sensors 2002: first IEEE international conference on sensors
Place of PublicationPiscataway
PublisherIEEE Society
Pages499-502
Number of pages4
ISBN (Print)0-7803-7455-X
Publication statusPublished - 2002
EventIEEE Sensors 2002: 1st International Conference on Sensors - Orlando, FL, United States
Duration: 11 Jun 200214 Jun 2002

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE Sensors 2002
CountryUnited States
CityOrlando, FL
Period11/06/0214/06/02

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag
  • ZX Int.klas.verslagjaar < 2002

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