14×14 beams in a scanning electron microscope

A. Mohammadi Gheidari; P. Kruit

14×14 beams in a scanning electron microscope

ImPhys/Microscopy Instrumentation & Techniques

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Abstract

In this paper, the multi-beam source (MBS) unite is analyzed and the experimental results are presented. The basic concept in the MBS is that the broad beam of a high brightness Schottky source is split up into multiple sub-beams by an aperture array (AA). The AA is a silicon wafer with 100 holes and together with two macro electrodes acts as an aperture lens array (ALA) to focus each beam individually on to the blanker array (BA).

Original language	English
Title of host publication	2009 22nd International Vacuum Nanoelectronics Conference
Publication status	Published - 20 Jul 2009

Cite this

@inproceedings{9da69de56aaf472fba1148089eff36b8,

title = "14×14 beams in a scanning electron microscope",

abstract = "In this paper, the multi-beam source (MBS) unite is analyzed and the experimental results are presented. The basic concept in the MBS is that the broad beam of a high brightness Schottky source is split up into multiple sub-beams by an aperture array (AA). The AA is a silicon wafer with 100 holes and together with two macro electrodes acts as an aperture lens array (ALA) to focus each beam individually on to the blanker array (BA).",

author = "{Mohammadi Gheidari}, A. and P. Kruit",

year = "2009",

month = jul,

day = "20",

language = "English",

booktitle = "2009 22nd International Vacuum Nanoelectronics Conference",

}

TY - GEN

T1 - 14×14 beams in a scanning electron microscope

AU - Mohammadi Gheidari, A.

AU - Kruit, P.

PY - 2009/7/20

Y1 - 2009/7/20

N2 - In this paper, the multi-beam source (MBS) unite is analyzed and the experimental results are presented. The basic concept in the MBS is that the broad beam of a high brightness Schottky source is split up into multiple sub-beams by an aperture array (AA). The AA is a silicon wafer with 100 holes and together with two macro electrodes acts as an aperture lens array (ALA) to focus each beam individually on to the blanker array (BA).

AB - In this paper, the multi-beam source (MBS) unite is analyzed and the experimental results are presented. The basic concept in the MBS is that the broad beam of a high brightness Schottky source is split up into multiple sub-beams by an aperture array (AA). The AA is a silicon wafer with 100 holes and together with two macro electrodes acts as an aperture lens array (ALA) to focus each beam individually on to the blanker array (BA).

M3 - Conference contribution

BT - 2009 22nd International Vacuum Nanoelectronics Conference

ER -

14×14 beams in a scanning electron microscope

Abstract

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