14×14 beams in a scanning electron microscope

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Abstract

In this paper, the multi-beam source (MBS) unite is analyzed and the experimental results are presented. The basic concept in the MBS is that the broad beam of a high brightness Schottky source is split up into multiple sub-beams by an aperture array (AA). The AA is a silicon wafer with 100 holes and together with two macro electrodes acts as an aperture lens array (ALA) to focus each beam individually on to the blanker array (BA).
Original languageEnglish
Title of host publication2009 22nd International Vacuum Nanoelectronics Conference
Publication statusPublished - 20 Jul 2009

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