2D Electro-Thermal Microgrippers with Large Clamping and Rotation Motion at Low Driving Voltage

T Chu Duc, GK Lau, J Wei, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

6 Citations (Scopus)

Abstract

This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 µm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160 degrees Centigrade.
Original languageUndefined/Unknown
Title of host publicationProceedings of the 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Editors Jong-Uk Bu, Satoshi Konishi
Place of PublicationKobe, Japan
PublisherIEEE Society
Pages687-690
Number of pages4
ISBN (Print)1-4244-0951-9
Publication statusPublished - 2007
Event20th International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 21 Jan 200725 Jan 2007

Publication series

Name
PublisherIEEE

Conference

Conference20th International Conference on Micro Electro Mechanical Systems, MEMS 2007
Period21/01/0725/01/07

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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