3-D silicon carbide surface micromachined accelerometer compatible with CMOS processing

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

4 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of ASDAM 2008
Editors s.n.
Place of Publicationsmolenice,slovakia
PublisherSlovak Academy of Sciences
Pages227-230
Number of pages4
ISBN (Print)978-1-4244-2325-5
Publication statusPublished - 2008
EventIEEE Advanced semiconductor devices and microsystems (ASDAM) 2008, Smolenice, Slovakia - smolenice,slovakia
Duration: 12 Oct 200816 Oct 2008

Publication series

Name
PublisherSlovak academy of sciences

Conference

ConferenceIEEE Advanced semiconductor devices and microsystems (ASDAM) 2008, Smolenice, Slovakia
Period12/10/0816/10/08

Keywords

  • conference contrib. non-refer.
  • Conf.proc. > 3 pag

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