High-performance wafer-scale transfer-free graphene microphones

Roberto Pezone; G. Baglioni; Pasqualina M. Sarro; Peter G. Steeneken; Sten Vollebregt

doi:10.1109/MEMS49605.2023.10052360

High-performance wafer-scale transfer-free graphene microphones

Roberto Pezone, G. Baglioni, Pasqualina M. Sarro, Peter G. Steeneken, Sten Vollebregt

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene diaphragms in microphones due to the absence of automatic transfer methods on non-planarized target substrates. This method aims to overcome this limitation by combining a full-dry release of Chemical Vapor Deposition (CVD) graphene by Deep Reactive Ion Etching (DRIE) and vapor HF (VHF).

Original language	English
Title of host publication	Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	Danvers
Publisher	IEEE
Pages	131-134
Number of pages	4
ISBN (Electronic)	978-1-6654-9308-6
ISBN (Print)	978-1-6654-9309-3
DOIs	https://doi.org/10.1109/MEMS49605.2023.10052360
Publication status	Published - 2023
Event	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) - Munich, Germany Duration: 15 Jan 2023 → 19 Jan 2023 Conference number: 36th

Conference

Conference	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Country/Territory	Germany
City	Munich
Period	15/01/23 → 19/01/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Graphene
Microphone
Membrane
Wafer-Scale
MEMS
Transfer-Free

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10.1109/MEMS49605.2023.10052360

High-Performance_Wafer-Scale_Transfer-Free_Graphene_MicrophonesFinal published version, 1.69 MB

Cite this

@inproceedings{315adfa7a25844a7a42633da85dc027e,

title = "High-performance wafer-scale transfer-free graphene microphones",

abstract = "A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene diaphragms in microphones due to the absence of automatic transfer methods on non-planarized target substrates. This method aims to overcome this limitation by combining a full-dry release of Chemical Vapor Deposition (CVD) graphene by Deep Reactive Ion Etching (DRIE) and vapor HF (VHF).",

keywords = "Graphene, Microphone, Membrane, Wafer-Scale, MEMS, Transfer-Free",

author = "Roberto Pezone and G. Baglioni and Sarro, {Pasqualina M.} and Steeneken, {Peter G.} and Sten Vollebregt",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 15-01-2023 Through 19-01-2023",

year = "2023",

doi = "10.1109/MEMS49605.2023.10052360",

language = "English",

isbn = "978-1-6654-9309-3",

pages = "131--134",

booktitle = "Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

}

Pezone, R , Baglioni, G , Sarro, PM , Steeneken, PG & Vollebregt, S 2023, High-performance wafer-scale transfer-free graphene microphones. in Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Danvers, pp. 131-134, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), Munich, Germany, 15/01/23. https://doi.org/10.1109/MEMS49605.2023.10052360

High-performance wafer-scale transfer-free graphene microphones. / Pezone, Roberto ; Baglioni, G.; Sarro, Pasqualina M. et al.
Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). Danvers: IEEE, 2023. p. 131-134.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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BT - Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

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ER -

High-performance wafer-scale transfer-free graphene microphones

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Bibliographical note

Keywords

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