3D Hall-Effect Magnetometer Using a Single Inverted Pyramid Structure

Jacopo Ruggeri*, Jannik Strube, Karen M. Dowling

*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

This paper reports on the creation of a novel 3D Hall-effect sensor based on an anisotropically etched, inverted pyramid structure. Specific biasing and sensing contact configurations are employed to extract the in-plane or out-of-plane components of the magnetic field, eliminating cross-sensitivity by symmetry. Simulations were performed to verify the functionality and performance of the device, and the results suggested that sensitivity can be manipulated by varying the size-to-contact ratio. MEMS and CMOS processes were leveraged to create small-footprint, single-structure magnetometers with high in-plane/out-of-plane sensitivity. Four different geometries were characterized and maximum in-plane sensitivities of 80.1 V/A/T and 22.3 mV/V/T and in-plane to out-of-plane sensitivity ratios of up to 0.77/1.09 (current/voltage-related) were measured. The presented pyramid structure enables a path toward CMOS-integrated, spatially isotropic magnetometers using a single Hall sensor.
Original languageEnglish
Title of host publicationProceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of PublicationDanvers
PublisherIEEE
Pages48-51
Number of pages4
ISBN (Electronic)979-8-3503-5792-9
ISBN (Print)979-8-3503-5792-9
DOIs
Publication statusPublished - 2024
Event2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) - Austin, United States
Duration: 21 Jan 202425 Jan 2024
Conference number: 37th

Conference

Conference2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Country/TerritoryUnited States
CityAustin
Period21/01/2425/01/24

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • 3D Magnetometer
  • Hall-Effect
  • Inverted Pyramid

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