3D Microstructuring of silicon and SU8 polymer for microsystems applications

PM Sarro, J Wei, T Chu Duc

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProc. 19th micromechanics europe (MME 2008)
EditorsU Schnakenberg
Place of PublicationAachem, Germany
PublisherInstituut of Materials in Electrical Engineering
Pages237-241
Number of pages5
ISBN (Print)978-3-00-025529-8
Publication statusPublished - 2008
Event19th micromechanics europe (MME 2008), Aachem, Germany - Aachem, Germany
Duration: 28 Sep 200830 Sep 2008

Publication series

Name
PublisherInstituut of Materials in Electrical Engineering

Conference

Conference19th micromechanics europe (MME 2008), Aachem, Germany
Period28/09/0830/09/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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