TY - JOUR
T1 - 3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography
T2 - Visualization, Modeling, and Applications in Nanofabrication
AU - Cai, Jingxuan
AU - Zhu, Zhouyang
AU - Alkemade, Paul F.A.
AU - van Veldhoven, Emile
AU - Wang, Qianjin
AU - Ge, Haixiong
AU - Rodrigues, Sean P.
AU - Cai, Wenshan
AU - Li, Wen Di
PY - 2018/6/22
Y1 - 2018/6/22
N2 - In this paper, 3D volumetric energy deposition and local crosslinking of hydrogen silsesquioxane (HSQ) are experimentally and numerically explored in focused helium ion beam lithography (HIBL). In particular, a through-membrane exposure method is developed to make visible and subsequently to measure the 3D interaction volume and energy deposition of helium ions in HSQ. By comparing the actual dimensions of the crosslinked HSQ structures with Monte Carlo modeling of the spatial distribution of the energy deposition, the critical energy density for crosslinking HSQ is obtained. Finally, 3D nanofabrication of complex crosslinked HSQ nanostructures such as embedded nanochannels and suspended grids is demonstrated using two different exposure configurations. The proposed method expands the 2D point spread function of HIBL into three dimensions, thus opening a new avenue for nanoscale 3D fabrication.
AB - In this paper, 3D volumetric energy deposition and local crosslinking of hydrogen silsesquioxane (HSQ) are experimentally and numerically explored in focused helium ion beam lithography (HIBL). In particular, a through-membrane exposure method is developed to make visible and subsequently to measure the 3D interaction volume and energy deposition of helium ions in HSQ. By comparing the actual dimensions of the crosslinked HSQ structures with Monte Carlo modeling of the spatial distribution of the energy deposition, the critical energy density for crosslinking HSQ is obtained. Finally, 3D nanofabrication of complex crosslinked HSQ nanostructures such as embedded nanochannels and suspended grids is demonstrated using two different exposure configurations. The proposed method expands the 2D point spread function of HIBL into three dimensions, thus opening a new avenue for nanoscale 3D fabrication.
KW - 3D nanofabrication
KW - focused helium ion beam lithography
KW - hydrogen silsesquioxane
KW - localized volumetric energy deposition
UR - http://www.scopus.com/inward/record.url?scp=85048990810&partnerID=8YFLogxK
U2 - 10.1002/admi.201800203
DO - 10.1002/admi.201800203
M3 - Article
AN - SCOPUS:85048990810
SN - 2196-7350
VL - 5
JO - Advanced Materials Interfaces
JF - Advanced Materials Interfaces
IS - 12
M1 - 1800203
ER -