3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication

Jingxuan Cai, Zhouyang Zhu, Paul F.A. Alkemade, Emile van Veldhoven, Qianjin Wang, Haixiong Ge, Sean P. Rodrigues, Wenshan Cai, Wen Di Li

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

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Engineering & Materials Science