3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication

Jingxuan Cai, Zhouyang Zhu, Paul F.A. Alkemade, Emile van Veldhoven, Qianjin Wang, Haixiong Ge, Sean P. Rodrigues, Wenshan Cai*, Wen Di Li

*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

16 Citations (Scopus)

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Engineering & Materials Science